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- W2010698524 endingPage "929" @default.
- W2010698524 startingPage "927" @default.
- W2010698524 abstract "A hydrogen-free SiN film was deposited by ion beam sputtering at low temperature. The substrate surface was almost parallel to the ion beam. The deposited SiN film exhibited high chemical endurance, high thermal endurance, and low density of memory traps." @default.
- W2010698524 created "2016-06-24" @default.
- W2010698524 creator A5036954845 @default.
- W2010698524 creator A5065370677 @default.
- W2010698524 date "1986-10-13" @default.
- W2010698524 modified "2023-10-16" @default.
- W2010698524 title "Hydrogen-free SiN films deposited by ion beam sputtering" @default.
- W2010698524 cites W1981062833 @default.
- W2010698524 cites W2012874316 @default.
- W2010698524 cites W2021801674 @default.
- W2010698524 cites W2055451399 @default.
- W2010698524 cites W2072398410 @default.
- W2010698524 cites W2079432293 @default.
- W2010698524 cites W2079823909 @default.
- W2010698524 doi "https://doi.org/10.1063/1.97615" @default.
- W2010698524 hasPublicationYear "1986" @default.
- W2010698524 type Work @default.
- W2010698524 sameAs 2010698524 @default.
- W2010698524 citedByCount "12" @default.
- W2010698524 countsByYear W20106985242012 @default.
- W2010698524 countsByYear W20106985242015 @default.
- W2010698524 crossrefType "journal-article" @default.
- W2010698524 hasAuthorship W2010698524A5036954845 @default.
- W2010698524 hasAuthorship W2010698524A5065370677 @default.
- W2010698524 hasConcept C111368507 @default.
- W2010698524 hasConcept C113196181 @default.
- W2010698524 hasConcept C120665830 @default.
- W2010698524 hasConcept C121332964 @default.
- W2010698524 hasConcept C127313418 @default.
- W2010698524 hasConcept C145148216 @default.
- W2010698524 hasConcept C168834538 @default.
- W2010698524 hasConcept C171250308 @default.
- W2010698524 hasConcept C178790620 @default.
- W2010698524 hasConcept C185592680 @default.
- W2010698524 hasConcept C19067145 @default.
- W2010698524 hasConcept C192562407 @default.
- W2010698524 hasConcept C22423302 @default.
- W2010698524 hasConcept C2777289219 @default.
- W2010698524 hasConcept C43617362 @default.
- W2010698524 hasConcept C50774322 @default.
- W2010698524 hasConcept C512968161 @default.
- W2010698524 hasConcept C93106096 @default.
- W2010698524 hasConceptScore W2010698524C111368507 @default.
- W2010698524 hasConceptScore W2010698524C113196181 @default.
- W2010698524 hasConceptScore W2010698524C120665830 @default.
- W2010698524 hasConceptScore W2010698524C121332964 @default.
- W2010698524 hasConceptScore W2010698524C127313418 @default.
- W2010698524 hasConceptScore W2010698524C145148216 @default.
- W2010698524 hasConceptScore W2010698524C168834538 @default.
- W2010698524 hasConceptScore W2010698524C171250308 @default.
- W2010698524 hasConceptScore W2010698524C178790620 @default.
- W2010698524 hasConceptScore W2010698524C185592680 @default.
- W2010698524 hasConceptScore W2010698524C19067145 @default.
- W2010698524 hasConceptScore W2010698524C192562407 @default.
- W2010698524 hasConceptScore W2010698524C22423302 @default.
- W2010698524 hasConceptScore W2010698524C2777289219 @default.
- W2010698524 hasConceptScore W2010698524C43617362 @default.
- W2010698524 hasConceptScore W2010698524C50774322 @default.
- W2010698524 hasConceptScore W2010698524C512968161 @default.
- W2010698524 hasConceptScore W2010698524C93106096 @default.
- W2010698524 hasIssue "15" @default.
- W2010698524 hasLocation W20106985241 @default.
- W2010698524 hasOpenAccess W2010698524 @default.
- W2010698524 hasPrimaryLocation W20106985241 @default.
- W2010698524 hasRelatedWork W1537225155 @default.
- W2010698524 hasRelatedWork W2062131588 @default.
- W2010698524 hasRelatedWork W2077528868 @default.
- W2010698524 hasRelatedWork W2086744665 @default.
- W2010698524 hasRelatedWork W2132925456 @default.
- W2010698524 hasRelatedWork W2332768081 @default.
- W2010698524 hasRelatedWork W2350862848 @default.
- W2010698524 hasRelatedWork W2526521535 @default.
- W2010698524 hasRelatedWork W2724302003 @default.
- W2010698524 hasRelatedWork W2728375313 @default.
- W2010698524 hasVolume "49" @default.
- W2010698524 isParatext "false" @default.
- W2010698524 isRetracted "false" @default.
- W2010698524 magId "2010698524" @default.
- W2010698524 workType "article" @default.