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• W2010717690 endingPage "529" @default.
• W2010717690 startingPage "521" @default.
• W2010717690 abstract "High quality amorphous hydrogenated silicon (a-Si:H) films were deposited from disilane using a fluorine laser (157 nm) in a parallel configuration. The deposition of a-Si:H films at low source gas partial pressures (3–10 μbar) was possible due to the high photon flux and the relatively high absorption cross section of disilane at this wavelength. Regarding its properties, the material obtained by VUV laser CVD is comparable to high quality PECVD films deposited at similar substrate temperatures. Typical values of a sample grown at a substrate temperature of 270°C are a dark conductivity of 5.0 × 10−11 S/cm, photoconductivity of 6.3 × 10−5 S/cm, Urbach energy of 59 meV, optical band gap energy of 1.62 eV, a hydrogen content of 11 at% and a SiH2/SiH concentration ratio of 0.08. We developed a one-dimensional model, which describes the gas phase processes, to improve our understanding of the deposition process. This model is based on the data obtained by mass spectrometric analysis of the exhaust gas taking into account the diffusion, the gas flux, a broad spectrum of chemical reactions and the adsorption of species on the film surface and the reactor walls as well as their interaction with the laser radiation." @default.
• W2010717690 created "2016-06-24" @default.
• W2010717690 creator A5007668496 @default.
• W2010717690 creator A5034800344 @default.
• W2010717690 creator A5042974152 @default.
• W2010717690 creator A5074479063 @default.
• W2010717690 creator A5082469800 @default.
• W2010717690 creator A5087932152 @default.
• W2010717690 date "1995-02-01" @default.
• W2010717690 modified "2023-10-03" @default.
• W2010717690 title "VUV laser (157 nm) chemical vapor deposition of high quality amorphous hydrogenated silicon: gas phase chemistry and modelling" @default.
• W2010717690 cites W127924439 @default.
• W2010717690 cites W1969900897 @default.
• W2010717690 cites W1975113145 @default.
• W2010717690 cites W1988240557 @default.
• W2010717690 cites W1997221916 @default.
• W2010717690 cites W2012077771 @default.
• W2010717690 cites W2012899125 @default.
• W2010717690 cites W2027207617 @default.
• W2010717690 cites W2029327576 @default.
• W2010717690 cites W2032879093 @default.
• W2010717690 cites W2040572926 @default.
• W2010717690 cites W2040875144 @default.
• W2010717690 cites W2041597482 @default.
• W2010717690 cites W2049478289 @default.
• W2010717690 cites W2050682789 @default.
• W2010717690 cites W2051705560 @default.
• W2010717690 cites W2065299555 @default.
• W2010717690 cites W2069900930 @default.
• W2010717690 cites W2077993890 @default.
• W2010717690 cites W2079266962 @default.
• W2010717690 cites W2085022405 @default.
• W2010717690 cites W2094264215 @default.
• W2010717690 cites W2326014638 @default.
• W2010717690 cites W2625699652 @default.
• W2010717690 doi "https://doi.org/10.1016/0169-4332(94)00459-5" @default.
• W2010717690 hasPublicationYear "1995" @default.
• W2010717690 type Work @default.
• W2010717690 sameAs 2010717690 @default.
• W2010717690 citedByCount "16" @default.
• W2010717690 countsByYear W20107176902013 @default.
• W2010717690 crossrefType "journal-article" @default.
• W2010717690 hasAuthorship W2010717690A5007668496 @default.
• W2010717690 hasAuthorship W2010717690A5034800344 @default.
• W2010717690 hasAuthorship W2010717690A5042974152 @default.
• W2010717690 hasAuthorship W2010717690A5074479063 @default.
• W2010717690 hasAuthorship W2010717690A5082469800 @default.
• W2010717690 hasAuthorship W2010717690A5087932152 @default.
• W2010717690 hasConcept C111368507 @default.
• W2010717690 hasConcept C113196181 @default.
• W2010717690 hasConcept C127313418 @default.
• W2010717690 hasConcept C178790620 @default.
• W2010717690 hasConcept C185592680 @default.
• W2010717690 hasConcept C192562407 @default.
• W2010717690 hasConcept C201999631 @default.
• W2010717690 hasConcept C2776259327 @default.
• W2010717690 hasConcept C2776390347 @default.
• W2010717690 hasConcept C2777289219 @default.
• W2010717690 hasConcept C2779667780 @default.
• W2010717690 hasConcept C38347018 @default.
• W2010717690 hasConcept C43617362 @default.
• W2010717690 hasConcept C49040817 @default.
• W2010717690 hasConcept C512968161 @default.
• W2010717690 hasConcept C544956773 @default.
• W2010717690 hasConcept C56052488 @default.
• W2010717690 hasConcept C57410435 @default.
• W2010717690 hasConceptScore W2010717690C111368507 @default.
• W2010717690 hasConceptScore W2010717690C113196181 @default.
• W2010717690 hasConceptScore W2010717690C127313418 @default.
• W2010717690 hasConceptScore W2010717690C178790620 @default.
• W2010717690 hasConceptScore W2010717690C185592680 @default.
• W2010717690 hasConceptScore W2010717690C192562407 @default.
• W2010717690 hasConceptScore W2010717690C201999631 @default.
• W2010717690 hasConceptScore W2010717690C2776259327 @default.
• W2010717690 hasConceptScore W2010717690C2776390347 @default.
• W2010717690 hasConceptScore W2010717690C2777289219 @default.
• W2010717690 hasConceptScore W2010717690C2779667780 @default.
• W2010717690 hasConceptScore W2010717690C38347018 @default.
• W2010717690 hasConceptScore W2010717690C43617362 @default.
• W2010717690 hasConceptScore W2010717690C49040817 @default.
• W2010717690 hasConceptScore W2010717690C512968161 @default.
• W2010717690 hasConceptScore W2010717690C544956773 @default.
• W2010717690 hasConceptScore W2010717690C56052488 @default.
• W2010717690 hasConceptScore W2010717690C57410435 @default.
• W2010717690 hasIssue "1-4" @default.
• W2010717690 hasLocation W20107176901 @default.
• W2010717690 hasOpenAccess W2010717690 @default.
• W2010717690 hasPrimaryLocation W20107176901 @default.
• W2010717690 hasRelatedWork W1980814894 @default.
• W2010717690 hasRelatedWork W2004961340 @default.
• W2010717690 hasRelatedWork W2007826678 @default.
• W2010717690 hasRelatedWork W2042925503 @default.
• W2010717690 hasRelatedWork W2065516818 @default.
• W2010717690 hasRelatedWork W2077352501 @default.
• W2010717690 hasRelatedWork W2079672976 @default.
• W2010717690 hasRelatedWork W2083321254 @default.
• W2010717690 hasRelatedWork W2094853359 @default.
• W2010717690 hasRelatedWork W2579453053 @default.

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