Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010719848> ?p ?o ?g. }
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- W2010719848 endingPage "358" @default.
- W2010719848 startingPage "353" @default.
- W2010719848 abstract "Abstract Acetalized poly(vinyl alcohol)s which were synthesized from poly(vinyl alcohol) (PVA) and aldehyde or ketone were evaluated as electron beam (EB) resists, in order to investigate the relationship between EB sensitivity and chemical structures of the polymers. It was found that the acetalized PVAs were easily crosslinked by EB exposure. The main mechanism of crosslinking may be radical reaction at acetal group. The sensitivity of the acetalized PVA depended on the structure of the acetal group. Acetalized PVAs synthesized from benzaldehyde, in which the electron attracting group was substituted on the benzene ring and from linear aliphatic aldehyde having a long alkyl chain, had high sensitivity. A high sensitivity of 7.2 × 10 −7 C/cm 2 was attained when the acetalized PVA synthesized from p‐chloro‐benzaldehyde was used. Acetalized PVAs synthesized from PVA and aldehyde having a cyclic structure had an excellent dry etching durability and were suitable as negative EB resists." @default.
- W2010719848 created "2016-06-24" @default.
- W2010719848 creator A5000428061 @default.
- W2010719848 creator A5003338053 @default.
- W2010719848 creator A5039167492 @default.
- W2010719848 creator A5063515948 @default.
- W2010719848 creator A5077609511 @default.
- W2010719848 date "1989-03-01" @default.
- W2010719848 modified "2023-10-01" @default.
- W2010719848 title "Relationship between electron sensitivity and chemical structures of polymers as electron beam resists. VI: Electron sensitivity of various acetalized poly(vinyl alcohol)s" @default.
- W2010719848 cites W1966675312 @default.
- W2010719848 cites W2002428919 @default.
- W2010719848 cites W2016642728 @default.
- W2010719848 cites W2024669833 @default.
- W2010719848 cites W2037286151 @default.
- W2010719848 cites W2044653519 @default.
- W2010719848 cites W2056348494 @default.
- W2010719848 cites W2073116395 @default.
- W2010719848 cites W2079868234 @default.
- W2010719848 cites W2085819669 @default.
- W2010719848 cites W2087517011 @default.
- W2010719848 cites W2112321556 @default.
- W2010719848 cites W2119779429 @default.
- W2010719848 cites W4238667546 @default.
- W2010719848 doi "https://doi.org/10.1002/pen.760290602" @default.
- W2010719848 hasPublicationYear "1989" @default.
- W2010719848 type Work @default.
- W2010719848 sameAs 2010719848 @default.
- W2010719848 citedByCount "1" @default.
- W2010719848 crossrefType "journal-article" @default.
- W2010719848 hasAuthorship W2010719848A5000428061 @default.
- W2010719848 hasAuthorship W2010719848A5003338053 @default.
- W2010719848 hasAuthorship W2010719848A5039167492 @default.
- W2010719848 hasAuthorship W2010719848A5063515948 @default.
- W2010719848 hasAuthorship W2010719848A5077609511 @default.
- W2010719848 hasConcept C159985019 @default.
- W2010719848 hasConcept C161790260 @default.
- W2010719848 hasConcept C178790620 @default.
- W2010719848 hasConcept C185592680 @default.
- W2010719848 hasConcept C188027245 @default.
- W2010719848 hasConcept C192562407 @default.
- W2010719848 hasConcept C2777731525 @default.
- W2010719848 hasConcept C2779227376 @default.
- W2010719848 hasConcept C2779692420 @default.
- W2010719848 hasConcept C2779825165 @default.
- W2010719848 hasConcept C2780263894 @default.
- W2010719848 hasConcept C2780666587 @default.
- W2010719848 hasConcept C2781066024 @default.
- W2010719848 hasConcept C521977710 @default.
- W2010719848 hasConcept C53524968 @default.
- W2010719848 hasConceptScore W2010719848C159985019 @default.
- W2010719848 hasConceptScore W2010719848C161790260 @default.
- W2010719848 hasConceptScore W2010719848C178790620 @default.
- W2010719848 hasConceptScore W2010719848C185592680 @default.
- W2010719848 hasConceptScore W2010719848C188027245 @default.
- W2010719848 hasConceptScore W2010719848C192562407 @default.
- W2010719848 hasConceptScore W2010719848C2777731525 @default.
- W2010719848 hasConceptScore W2010719848C2779227376 @default.
- W2010719848 hasConceptScore W2010719848C2779692420 @default.
- W2010719848 hasConceptScore W2010719848C2779825165 @default.
- W2010719848 hasConceptScore W2010719848C2780263894 @default.
- W2010719848 hasConceptScore W2010719848C2780666587 @default.
- W2010719848 hasConceptScore W2010719848C2781066024 @default.
- W2010719848 hasConceptScore W2010719848C521977710 @default.
- W2010719848 hasConceptScore W2010719848C53524968 @default.
- W2010719848 hasIssue "6" @default.
- W2010719848 hasLocation W20107198481 @default.
- W2010719848 hasOpenAccess W2010719848 @default.
- W2010719848 hasPrimaryLocation W20107198481 @default.
- W2010719848 hasRelatedWork W2010719848 @default.
- W2010719848 hasRelatedWork W2032109186 @default.
- W2010719848 hasRelatedWork W2051907068 @default.
- W2010719848 hasRelatedWork W2055303380 @default.
- W2010719848 hasRelatedWork W2350039568 @default.
- W2010719848 hasRelatedWork W2371208823 @default.
- W2010719848 hasRelatedWork W2383906927 @default.
- W2010719848 hasRelatedWork W2766118352 @default.
- W2010719848 hasRelatedWork W2977755794 @default.
- W2010719848 hasRelatedWork W2182975375 @default.
- W2010719848 hasVolume "29" @default.
- W2010719848 isParatext "false" @default.
- W2010719848 isRetracted "false" @default.
- W2010719848 magId "2010719848" @default.
- W2010719848 workType "article" @default.