Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010806478> ?p ?o ?g. }
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- W2010806478 endingPage "1369" @default.
- W2010806478 startingPage "1365" @default.
- W2010806478 abstract "Electrical characteristic of argon plasma generated in a novel, three-electrode audio frequency (AF) reactor has been investigated by means of a Langmuir single probe movable in the space between reactor electrodes. Both AF potentials of plasma in various places of the reactor and typical current-voltage characteristics have been measured. It has been found that energetic conditions of the plasma, such as electron density and electron temperature, are independent on the coupling capacity C — the only operational parameter used in the reactor. Changes of C have, however, influence on the ion bombardment process taking place in the vicinity of a small electrode. The ion bombardment energy has been roughly estimated. The calculated values are in a good agreement with results of an experiment performed in the reactor with argon sputter etching of a gold film." @default.
- W2010806478 created "2016-06-24" @default.
- W2010806478 creator A5044006146 @default.
- W2010806478 creator A5063518426 @default.
- W2010806478 creator A5068057934 @default.
- W2010806478 date "1998-01-01" @default.
- W2010806478 modified "2023-10-14" @default.
- W2010806478 title "Characterization of low-frequency plasma generated in a three-electrode reactor" @default.
- W2010806478 cites W1975720018 @default.
- W2010806478 cites W1991758339 @default.
- W2010806478 cites W1995679314 @default.
- W2010806478 cites W2014821930 @default.
- W2010806478 cites W2017598082 @default.
- W2010806478 cites W2058244591 @default.
- W2010806478 cites W2065211063 @default.
- W2010806478 doi "https://doi.org/10.1016/s0257-8972(97)00366-6" @default.
- W2010806478 hasPublicationYear "1998" @default.
- W2010806478 type Work @default.
- W2010806478 sameAs 2010806478 @default.
- W2010806478 citedByCount "2" @default.
- W2010806478 crossrefType "journal-article" @default.
- W2010806478 hasAuthorship W2010806478A5044006146 @default.
- W2010806478 hasAuthorship W2010806478A5063518426 @default.
- W2010806478 hasAuthorship W2010806478A5068057934 @default.
- W2010806478 hasConcept C100460472 @default.
- W2010806478 hasConcept C107187091 @default.
- W2010806478 hasConcept C113196181 @default.
- W2010806478 hasConcept C121332964 @default.
- W2010806478 hasConcept C145148216 @default.
- W2010806478 hasConcept C147789679 @default.
- W2010806478 hasConcept C171250308 @default.
- W2010806478 hasConcept C17525397 @default.
- W2010806478 hasConcept C176118016 @default.
- W2010806478 hasConcept C178790620 @default.
- W2010806478 hasConcept C184779094 @default.
- W2010806478 hasConcept C185544564 @default.
- W2010806478 hasConcept C185592680 @default.
- W2010806478 hasConcept C19067145 @default.
- W2010806478 hasConcept C192039680 @default.
- W2010806478 hasConcept C192562407 @default.
- W2010806478 hasConcept C22175881 @default.
- W2010806478 hasConcept C22423302 @default.
- W2010806478 hasConcept C2779227376 @default.
- W2010806478 hasConcept C43503373 @default.
- W2010806478 hasConcept C43617362 @default.
- W2010806478 hasConcept C547737533 @default.
- W2010806478 hasConcept C60581705 @default.
- W2010806478 hasConcept C82706917 @default.
- W2010806478 hasConceptScore W2010806478C100460472 @default.
- W2010806478 hasConceptScore W2010806478C107187091 @default.
- W2010806478 hasConceptScore W2010806478C113196181 @default.
- W2010806478 hasConceptScore W2010806478C121332964 @default.
- W2010806478 hasConceptScore W2010806478C145148216 @default.
- W2010806478 hasConceptScore W2010806478C147789679 @default.
- W2010806478 hasConceptScore W2010806478C171250308 @default.
- W2010806478 hasConceptScore W2010806478C17525397 @default.
- W2010806478 hasConceptScore W2010806478C176118016 @default.
- W2010806478 hasConceptScore W2010806478C178790620 @default.
- W2010806478 hasConceptScore W2010806478C184779094 @default.
- W2010806478 hasConceptScore W2010806478C185544564 @default.
- W2010806478 hasConceptScore W2010806478C185592680 @default.
- W2010806478 hasConceptScore W2010806478C19067145 @default.
- W2010806478 hasConceptScore W2010806478C192039680 @default.
- W2010806478 hasConceptScore W2010806478C192562407 @default.
- W2010806478 hasConceptScore W2010806478C22175881 @default.
- W2010806478 hasConceptScore W2010806478C22423302 @default.
- W2010806478 hasConceptScore W2010806478C2779227376 @default.
- W2010806478 hasConceptScore W2010806478C43503373 @default.
- W2010806478 hasConceptScore W2010806478C43617362 @default.
- W2010806478 hasConceptScore W2010806478C547737533 @default.
- W2010806478 hasConceptScore W2010806478C60581705 @default.
- W2010806478 hasConceptScore W2010806478C82706917 @default.
- W2010806478 hasIssue "1-3" @default.
- W2010806478 hasLocation W20108064781 @default.
- W2010806478 hasOpenAccess W2010806478 @default.
- W2010806478 hasPrimaryLocation W20108064781 @default.
- W2010806478 hasRelatedWork W1601588525 @default.
- W2010806478 hasRelatedWork W1619276345 @default.
- W2010806478 hasRelatedWork W1979214263 @default.
- W2010806478 hasRelatedWork W2000932723 @default.
- W2010806478 hasRelatedWork W2010806478 @default.
- W2010806478 hasRelatedWork W2069397480 @default.
- W2010806478 hasRelatedWork W2140132324 @default.
- W2010806478 hasRelatedWork W2251646226 @default.
- W2010806478 hasRelatedWork W2970064295 @default.
- W2010806478 hasRelatedWork W2113046083 @default.
- W2010806478 hasVolume "98" @default.
- W2010806478 isParatext "false" @default.
- W2010806478 isRetracted "false" @default.
- W2010806478 magId "2010806478" @default.
- W2010806478 workType "article" @default.