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- W2010864900 endingPage "7418" @default.
- W2010864900 startingPage "7415" @default.
- W2010864900 abstract "In this work, we investigate the effects of oxygen (O2) and nitrogen (N2) plasma treatments on the copper surface of aluminum/amorphous silicon-nitricarbide/copper (Al/α-SiCN/Cu) metal–insulator–metal (MIM) capacitors with respect to their leakage current and breakdown field. It is found that both the O2- and N2-plasma treatments have an adverse effect on the leakage current and breakdown field of MIM capacitors. The MIM capacitors with their Cu surfaces subjected to O2- or N2-plasma treatment exhibit a room-temperature leakage current density several orders of magnitude larger than that of the sample without plasma treatment at the same applied electric field. The room-temperature breakdown fields of the MIM capacitors with O2- and N2-plasma-treated Cu surfaces are 3.8 and 3.2 MV/cm, respectively, while that of the control sample without plasma treatment is 7.8 MV/cm. The increased leakage currents and degraded breakdown fields of the O2- and N2-plasma-treated samples are attributed, respectively, to the presence of metastable Cu–O oxide and Cu–N azide at the Cu surfaces." @default.
- W2010864900 created "2016-06-24" @default.
- W2010864900 creator A5002033532 @default.
- W2010864900 creator A5035606497 @default.
- W2010864900 creator A5063789952 @default.
- W2010864900 creator A5067948521 @default.
- W2010864900 creator A5082708175 @default.
- W2010864900 creator A5088817105 @default.
- W2010864900 date "2004-11-10" @default.
- W2010864900 modified "2023-10-17" @default.
- W2010864900 title "Effects of O<sub>2</sub>- and N<sub>2</sub>-Plasma Treatments on Copper Surface" @default.
- W2010864900 cites W1990169942 @default.
- W2010864900 cites W2026350351 @default.
- W2010864900 cites W2029979207 @default.
- W2010864900 cites W2093979489 @default.
- W2010864900 cites W2112331257 @default.
- W2010864900 cites W2123405230 @default.
- W2010864900 cites W623762057 @default.
- W2010864900 cites W643377991 @default.
- W2010864900 doi "https://doi.org/10.1143/jjap.43.7415" @default.
- W2010864900 hasPublicationYear "2004" @default.
- W2010864900 type Work @default.
- W2010864900 sameAs 2010864900 @default.
- W2010864900 citedByCount "16" @default.
- W2010864900 countsByYear W20108649002013 @default.
- W2010864900 countsByYear W20108649002014 @default.
- W2010864900 countsByYear W20108649002015 @default.
- W2010864900 countsByYear W20108649002016 @default.
- W2010864900 countsByYear W20108649002018 @default.
- W2010864900 countsByYear W20108649002019 @default.
- W2010864900 countsByYear W20108649002020 @default.
- W2010864900 countsByYear W20108649002021 @default.
- W2010864900 countsByYear W20108649002022 @default.
- W2010864900 countsByYear W20108649002023 @default.
- W2010864900 crossrefType "journal-article" @default.
- W2010864900 hasAuthorship W2010864900A5002033532 @default.
- W2010864900 hasAuthorship W2010864900A5035606497 @default.
- W2010864900 hasAuthorship W2010864900A5063789952 @default.
- W2010864900 hasAuthorship W2010864900A5067948521 @default.
- W2010864900 hasAuthorship W2010864900A5082708175 @default.
- W2010864900 hasAuthorship W2010864900A5088817105 @default.
- W2010864900 hasConcept C121332964 @default.
- W2010864900 hasConcept C185544564 @default.
- W2010864900 hasConcept C191897082 @default.
- W2010864900 hasConcept C192562407 @default.
- W2010864900 hasConcept C2524010 @default.
- W2010864900 hasConcept C2776799497 @default.
- W2010864900 hasConcept C33923547 @default.
- W2010864900 hasConcept C544778455 @default.
- W2010864900 hasConcept C82706917 @default.
- W2010864900 hasConceptScore W2010864900C121332964 @default.
- W2010864900 hasConceptScore W2010864900C185544564 @default.
- W2010864900 hasConceptScore W2010864900C191897082 @default.
- W2010864900 hasConceptScore W2010864900C192562407 @default.
- W2010864900 hasConceptScore W2010864900C2524010 @default.
- W2010864900 hasConceptScore W2010864900C2776799497 @default.
- W2010864900 hasConceptScore W2010864900C33923547 @default.
- W2010864900 hasConceptScore W2010864900C544778455 @default.
- W2010864900 hasConceptScore W2010864900C82706917 @default.
- W2010864900 hasIssue "11A" @default.
- W2010864900 hasLocation W20108649001 @default.
- W2010864900 hasOpenAccess W2010864900 @default.
- W2010864900 hasPrimaryLocation W20108649001 @default.
- W2010864900 hasRelatedWork W1973961424 @default.
- W2010864900 hasRelatedWork W2022507789 @default.
- W2010864900 hasRelatedWork W2070338356 @default.
- W2010864900 hasRelatedWork W2312389078 @default.
- W2010864900 hasRelatedWork W2322722469 @default.
- W2010864900 hasRelatedWork W2550677491 @default.
- W2010864900 hasRelatedWork W3046190049 @default.
- W2010864900 hasRelatedWork W3094131129 @default.
- W2010864900 hasRelatedWork W4231413117 @default.
- W2010864900 hasRelatedWork W4253328832 @default.
- W2010864900 hasVolume "43" @default.
- W2010864900 isParatext "false" @default.
- W2010864900 isRetracted "false" @default.
- W2010864900 magId "2010864900" @default.
- W2010864900 workType "article" @default.