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- W2010870564 endingPage "1614" @default.
- W2010870564 startingPage "1608" @default.
- W2010870564 abstract "In this paper, the properties of low pressure chemically vapor deposited tungsten silicide films processed from tungsten chlorides and silane are studied as a function of hydrogen initial partial pressure. By means of thermodynamic calculations, we have defined a priori the operating conditions leading to each silicide deposition. The corresponding films are grown in a cold‐wall reactor and characterized by x‐ray diffraction and scanning electron microscopy studies. Good agreement between theoretical and experimental results is obtained. The increase of initial hydrogen partial pressure has two possible consequences: a modification of the film composition for high partial pressure and a modification of the film growth rate for lower partial pressure." @default.
- W2010870564 created "2016-06-24" @default.
- W2010870564 creator A5040085650 @default.
- W2010870564 creator A5047021668 @default.
- W2010870564 creator A5068458488 @default.
- W2010870564 creator A5075615408 @default.
- W2010870564 creator A5082078090 @default.
- W2010870564 date "1995-05-01" @default.
- W2010870564 modified "2023-09-23" @default.
- W2010870564 title "Influence of Hydrogen Pressure on the Properties of CVD Tungsten Silicide Films" @default.
- W2010870564 doi "https://doi.org/10.1149/1.2048621" @default.
- W2010870564 hasPublicationYear "1995" @default.
- W2010870564 type Work @default.
- W2010870564 sameAs 2010870564 @default.
- W2010870564 citedByCount "5" @default.
- W2010870564 countsByYear W20108705642013 @default.
- W2010870564 countsByYear W20108705642014 @default.
- W2010870564 crossrefType "journal-article" @default.
- W2010870564 hasAuthorship W2010870564A5040085650 @default.
- W2010870564 hasAuthorship W2010870564A5047021668 @default.
- W2010870564 hasAuthorship W2010870564A5068458488 @default.
- W2010870564 hasAuthorship W2010870564A5075615408 @default.
- W2010870564 hasAuthorship W2010870564A5082078090 @default.
- W2010870564 hasConcept C113196181 @default.
- W2010870564 hasConcept C120665830 @default.
- W2010870564 hasConcept C121332964 @default.
- W2010870564 hasConcept C159985019 @default.
- W2010870564 hasConcept C171250308 @default.
- W2010870564 hasConcept C178790620 @default.
- W2010870564 hasConcept C185592680 @default.
- W2010870564 hasConcept C191897082 @default.
- W2010870564 hasConcept C192562407 @default.
- W2010870564 hasConcept C207114421 @default.
- W2010870564 hasConcept C26771246 @default.
- W2010870564 hasConcept C2778024649 @default.
- W2010870564 hasConcept C2780901251 @default.
- W2010870564 hasConcept C512968161 @default.
- W2010870564 hasConcept C540031477 @default.
- W2010870564 hasConcept C542268612 @default.
- W2010870564 hasConcept C544956773 @default.
- W2010870564 hasConcept C57410435 @default.
- W2010870564 hasConcept C68463220 @default.
- W2010870564 hasConceptScore W2010870564C113196181 @default.
- W2010870564 hasConceptScore W2010870564C120665830 @default.
- W2010870564 hasConceptScore W2010870564C121332964 @default.
- W2010870564 hasConceptScore W2010870564C159985019 @default.
- W2010870564 hasConceptScore W2010870564C171250308 @default.
- W2010870564 hasConceptScore W2010870564C178790620 @default.
- W2010870564 hasConceptScore W2010870564C185592680 @default.
- W2010870564 hasConceptScore W2010870564C191897082 @default.
- W2010870564 hasConceptScore W2010870564C192562407 @default.
- W2010870564 hasConceptScore W2010870564C207114421 @default.
- W2010870564 hasConceptScore W2010870564C26771246 @default.
- W2010870564 hasConceptScore W2010870564C2778024649 @default.
- W2010870564 hasConceptScore W2010870564C2780901251 @default.
- W2010870564 hasConceptScore W2010870564C512968161 @default.
- W2010870564 hasConceptScore W2010870564C540031477 @default.
- W2010870564 hasConceptScore W2010870564C542268612 @default.
- W2010870564 hasConceptScore W2010870564C544956773 @default.
- W2010870564 hasConceptScore W2010870564C57410435 @default.
- W2010870564 hasConceptScore W2010870564C68463220 @default.
- W2010870564 hasIssue "5" @default.
- W2010870564 hasLocation W20108705641 @default.
- W2010870564 hasOpenAccess W2010870564 @default.
- W2010870564 hasPrimaryLocation W20108705641 @default.
- W2010870564 hasRelatedWork W1490265544 @default.
- W2010870564 hasRelatedWork W1915486748 @default.
- W2010870564 hasRelatedWork W1980650563 @default.
- W2010870564 hasRelatedWork W2013231695 @default.
- W2010870564 hasRelatedWork W2082932034 @default.
- W2010870564 hasRelatedWork W2086027165 @default.
- W2010870564 hasRelatedWork W2086218839 @default.
- W2010870564 hasRelatedWork W2095076225 @default.
- W2010870564 hasRelatedWork W2104247130 @default.
- W2010870564 hasRelatedWork W2949125045 @default.
- W2010870564 hasVolume "142" @default.
- W2010870564 isParatext "false" @default.
- W2010870564 isRetracted "false" @default.
- W2010870564 magId "2010870564" @default.
- W2010870564 workType "article" @default.