Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010950596> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2010950596 endingPage "1324" @default.
- W2010950596 startingPage "1322" @default.
- W2010950596 abstract "Profiles of Bi, Xe, Sn, Kr, Ga, Fe, K, Ar, P, Na, and F implanted into the AZ111 photoresist are compared with recent theoretical predictions. With the exception of the noble gases and F, the experimental results are well fitted by the Biersack–Haggmark [Nucl. Instrum. Methods 174, 257 (1980)] Monte Carlo calculations. For the noble gases we obtain ranges up to a factor of 2 shorter than the above predictions. Fluor changes the profile as function of energy, being nearly Gaussian at 30 keV and distributing according to the calculated ionization at 70 keV." @default.
- W2010950596 created "2016-06-24" @default.
- W2010950596 creator A5000572273 @default.
- W2010950596 creator A5029371820 @default.
- W2010950596 creator A5080037552 @default.
- W2010950596 creator A5083823166 @default.
- W2010950596 creator A5085831471 @default.
- W2010950596 creator A5088896243 @default.
- W2010950596 creator A5088970116 @default.
- W2010950596 date "1986-08-15" @default.
- W2010950596 modified "2023-10-03" @default.
- W2010950596 title "Mass and energy dependence of implanted ion profiles in the AZ111 photoresist" @default.
- W2010950596 cites W1976441185 @default.
- W2010950596 cites W2005869266 @default.
- W2010950596 cites W2018741875 @default.
- W2010950596 cites W2024172140 @default.
- W2010950596 doi "https://doi.org/10.1063/1.337304" @default.
- W2010950596 hasPublicationYear "1986" @default.
- W2010950596 type Work @default.
- W2010950596 sameAs 2010950596 @default.
- W2010950596 citedByCount "31" @default.
- W2010950596 crossrefType "journal-article" @default.
- W2010950596 hasAuthorship W2010950596A5000572273 @default.
- W2010950596 hasAuthorship W2010950596A5029371820 @default.
- W2010950596 hasAuthorship W2010950596A5080037552 @default.
- W2010950596 hasAuthorship W2010950596A5083823166 @default.
- W2010950596 hasAuthorship W2010950596A5085831471 @default.
- W2010950596 hasAuthorship W2010950596A5088896243 @default.
- W2010950596 hasAuthorship W2010950596A5088970116 @default.
- W2010950596 hasConcept C105795698 @default.
- W2010950596 hasConcept C121332964 @default.
- W2010950596 hasConcept C121530826 @default.
- W2010950596 hasConcept C134406635 @default.
- W2010950596 hasConcept C145148216 @default.
- W2010950596 hasConcept C171250308 @default.
- W2010950596 hasConcept C178790620 @default.
- W2010950596 hasConcept C184779094 @default.
- W2010950596 hasConcept C185592680 @default.
- W2010950596 hasConcept C192562407 @default.
- W2010950596 hasConcept C19499675 @default.
- W2010950596 hasConcept C198291218 @default.
- W2010950596 hasConcept C2779227376 @default.
- W2010950596 hasConcept C33923547 @default.
- W2010950596 hasConcept C41823505 @default.
- W2010950596 hasConceptScore W2010950596C105795698 @default.
- W2010950596 hasConceptScore W2010950596C121332964 @default.
- W2010950596 hasConceptScore W2010950596C121530826 @default.
- W2010950596 hasConceptScore W2010950596C134406635 @default.
- W2010950596 hasConceptScore W2010950596C145148216 @default.
- W2010950596 hasConceptScore W2010950596C171250308 @default.
- W2010950596 hasConceptScore W2010950596C178790620 @default.
- W2010950596 hasConceptScore W2010950596C184779094 @default.
- W2010950596 hasConceptScore W2010950596C185592680 @default.
- W2010950596 hasConceptScore W2010950596C192562407 @default.
- W2010950596 hasConceptScore W2010950596C19499675 @default.
- W2010950596 hasConceptScore W2010950596C198291218 @default.
- W2010950596 hasConceptScore W2010950596C2779227376 @default.
- W2010950596 hasConceptScore W2010950596C33923547 @default.
- W2010950596 hasConceptScore W2010950596C41823505 @default.
- W2010950596 hasIssue "4" @default.
- W2010950596 hasLocation W20109505961 @default.
- W2010950596 hasOpenAccess W2010950596 @default.
- W2010950596 hasPrimaryLocation W20109505961 @default.
- W2010950596 hasRelatedWork W150221835 @default.
- W2010950596 hasRelatedWork W1972349999 @default.
- W2010950596 hasRelatedWork W2019746727 @default.
- W2010950596 hasRelatedWork W2050446700 @default.
- W2010950596 hasRelatedWork W2055605975 @default.
- W2010950596 hasRelatedWork W2062194767 @default.
- W2010950596 hasRelatedWork W2094183573 @default.
- W2010950596 hasRelatedWork W4220658624 @default.
- W2010950596 hasRelatedWork W4238005095 @default.
- W2010950596 hasRelatedWork W4321018681 @default.
- W2010950596 hasVolume "60" @default.
- W2010950596 isParatext "false" @default.
- W2010950596 isRetracted "false" @default.
- W2010950596 magId "2010950596" @default.
- W2010950596 workType "article" @default.