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• W2010969326 abstract "We report on a photoelectron spectroscopy study of Al-dopants in 4H–SiC epitaxial layers. For silicon carbide (SiC) samples with an Al concentration of 1020 cm−3 we have been able to detect the Al2p photoemission signal. The Al2p signal is recorded through the oxide layer with a thickness of about 0.4 nm. We identify the emission signal of dopants and of small clusters. The latter become oxidized by diffusion of oxygen through the native oxide." @default.
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• W2010969326 date "2003-09-01" @default.
• W2010969326 modified "2023-10-02" @default.
• W2010969326 title "Photoelectron spectra of Al dopants in 4H–SiC" @default.
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• W2010969326 doi "https://doi.org/10.1016/s0921-5107(02)00721-3" @default.
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