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- W2011054106 endingPage "201" @default.
- W2011054106 startingPage "198" @default.
- W2011054106 abstract "The preparation of large area conductive transparent ITO films by an ANELVA C-3500 cluster type sputtering system for mass production was carried out. Effects of sputtering parameters, argon and oxygen flow rate, discharge power and substrate temperature on average values and uniformities of deposition rate, specific resistivity, sheet resistance, and transmittance in a substrate were studied by response surface methodology (RSM). Because all desirable properties and uniformities can not be satisfied at the same time, deposition parameters should be optimized. Average values of 2.82 × 10−4 Ωcm for specific resistivity and 89.8% for transmittance were obtained within the large area of 340 mm × 440 mm on a 370 mm × 470 mm substrate at a substrate temperature of about 200°C and at a discharge power of 3 kW with a deposition rate of 71 nm min−1. Other uniformities were ±2.9% for deposition rate, ±4.0% for sheet resistance, ±6.1% for specific resistivity, and ±1,3% for transmittance at the wave lengm of 700 nm." @default.
- W2011054106 created "2016-06-24" @default.
- W2011054106 creator A5020268658 @default.
- W2011054106 creator A5062364255 @default.
- W2011054106 creator A5090361671 @default.
- W2011054106 date "1996-08-01" @default.
- W2011054106 modified "2023-09-27" @default.
- W2011054106 title "Large area deposition of ITO films by cluster type sputtering system" @default.
- W2011054106 cites W2000836282 @default.
- W2011054106 doi "https://doi.org/10.1016/0040-6090(96)08612-9" @default.
- W2011054106 hasPublicationYear "1996" @default.
- W2011054106 type Work @default.
- W2011054106 sameAs 2011054106 @default.
- W2011054106 citedByCount "4" @default.
- W2011054106 crossrefType "journal-article" @default.
- W2011054106 hasAuthorship W2011054106A5020268658 @default.
- W2011054106 hasAuthorship W2011054106A5062364255 @default.
- W2011054106 hasAuthorship W2011054106A5090361671 @default.
- W2011054106 hasConcept C111368507 @default.
- W2011054106 hasConcept C113196181 @default.
- W2011054106 hasConcept C119599485 @default.
- W2011054106 hasConcept C121332964 @default.
- W2011054106 hasConcept C127313418 @default.
- W2011054106 hasConcept C127413603 @default.
- W2011054106 hasConcept C150493377 @default.
- W2011054106 hasConcept C151730666 @default.
- W2011054106 hasConcept C159985019 @default.
- W2011054106 hasConcept C171250308 @default.
- W2011054106 hasConcept C172120300 @default.
- W2011054106 hasConcept C178790620 @default.
- W2011054106 hasConcept C185592680 @default.
- W2011054106 hasConcept C19067145 @default.
- W2011054106 hasConcept C192562407 @default.
- W2011054106 hasConcept C22423302 @default.
- W2011054106 hasConcept C2777289219 @default.
- W2011054106 hasConcept C2779227376 @default.
- W2011054106 hasConcept C2816523 @default.
- W2011054106 hasConcept C43617362 @default.
- W2011054106 hasConcept C49040817 @default.
- W2011054106 hasConcept C547737533 @default.
- W2011054106 hasConcept C62520636 @default.
- W2011054106 hasConcept C64297162 @default.
- W2011054106 hasConcept C66825105 @default.
- W2011054106 hasConcept C69990965 @default.
- W2011054106 hasConcept C86803240 @default.
- W2011054106 hasConceptScore W2011054106C111368507 @default.
- W2011054106 hasConceptScore W2011054106C113196181 @default.
- W2011054106 hasConceptScore W2011054106C119599485 @default.
- W2011054106 hasConceptScore W2011054106C121332964 @default.
- W2011054106 hasConceptScore W2011054106C127313418 @default.
- W2011054106 hasConceptScore W2011054106C127413603 @default.
- W2011054106 hasConceptScore W2011054106C150493377 @default.
- W2011054106 hasConceptScore W2011054106C151730666 @default.
- W2011054106 hasConceptScore W2011054106C159985019 @default.
- W2011054106 hasConceptScore W2011054106C171250308 @default.
- W2011054106 hasConceptScore W2011054106C172120300 @default.
- W2011054106 hasConceptScore W2011054106C178790620 @default.
- W2011054106 hasConceptScore W2011054106C185592680 @default.
- W2011054106 hasConceptScore W2011054106C19067145 @default.
- W2011054106 hasConceptScore W2011054106C192562407 @default.
- W2011054106 hasConceptScore W2011054106C22423302 @default.
- W2011054106 hasConceptScore W2011054106C2777289219 @default.
- W2011054106 hasConceptScore W2011054106C2779227376 @default.
- W2011054106 hasConceptScore W2011054106C2816523 @default.
- W2011054106 hasConceptScore W2011054106C43617362 @default.
- W2011054106 hasConceptScore W2011054106C49040817 @default.
- W2011054106 hasConceptScore W2011054106C547737533 @default.
- W2011054106 hasConceptScore W2011054106C62520636 @default.
- W2011054106 hasConceptScore W2011054106C64297162 @default.
- W2011054106 hasConceptScore W2011054106C66825105 @default.
- W2011054106 hasConceptScore W2011054106C69990965 @default.
- W2011054106 hasConceptScore W2011054106C86803240 @default.
- W2011054106 hasLocation W20110541061 @default.
- W2011054106 hasOpenAccess W2011054106 @default.
- W2011054106 hasPrimaryLocation W20110541061 @default.
- W2011054106 hasRelatedWork W2010893755 @default.
- W2011054106 hasRelatedWork W2015482902 @default.
- W2011054106 hasRelatedWork W2029473859 @default.
- W2011054106 hasRelatedWork W2043368464 @default.
- W2011054106 hasRelatedWork W2081874730 @default.
- W2011054106 hasRelatedWork W2111714040 @default.
- W2011054106 hasRelatedWork W2249114551 @default.
- W2011054106 hasRelatedWork W2356671288 @default.
- W2011054106 hasRelatedWork W2392638099 @default.
- W2011054106 hasRelatedWork W2557029576 @default.
- W2011054106 hasVolume "281-282" @default.
- W2011054106 isParatext "false" @default.
- W2011054106 isRetracted "false" @default.
- W2011054106 magId "2011054106" @default.
- W2011054106 workType "article" @default.