Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011109801> ?p ?o ?g. }
- W2011109801 endingPage "313" @default.
- W2011109801 startingPage "303" @default.
- W2011109801 abstract "As feature sizes of integrated circuits are continuously shrinking in nanotechnologies, mining potentially useful information to extract manufacturing intelligence from big data automatically collected in the wafer fabrication facilities to assist in real time decisions for yield enhancement has become practically crucial to maintain competitive advantages and support intelligent manufacturing for operational excellence. Motivated by real needs, this study aims to develop an effective approach to extract manufacturing intelligence for early detection of key equipment excursion for advanced equipment control to enhance yield and reduce potential loss. For validation, an empirical study was conducted in a leading semiconductor manufacturing company to validate the proposed approach in the developed “early warning system” of newly released equipment to reduce tool excursion and abnormal yield loss. The results have demonstrated practical viability of the proposed approach. Indeed, the developed solution has ..." @default.
- W2011109801 created "2016-06-24" @default.
- W2011109801 creator A5020132059 @default.
- W2011109801 creator A5045919506 @default.
- W2011109801 creator A5047554774 @default.
- W2011109801 date "2012-07-01" @default.
- W2011109801 modified "2023-09-25" @default.
- W2011109801 title "Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing" @default.
- W2011109801 cites W1963784616 @default.
- W2011109801 cites W1979812372 @default.
- W2011109801 cites W1980424575 @default.
- W2011109801 cites W1983955765 @default.
- W2011109801 cites W1984782131 @default.
- W2011109801 cites W1992061061 @default.
- W2011109801 cites W1994062596 @default.
- W2011109801 cites W2015887489 @default.
- W2011109801 cites W2028678636 @default.
- W2011109801 cites W2039417101 @default.
- W2011109801 cites W2044855549 @default.
- W2011109801 cites W2051476628 @default.
- W2011109801 cites W2056945148 @default.
- W2011109801 cites W2066289742 @default.
- W2011109801 cites W2070195599 @default.
- W2011109801 cites W2070690609 @default.
- W2011109801 cites W2077170102 @default.
- W2011109801 cites W2083506210 @default.
- W2011109801 cites W2084885023 @default.
- W2011109801 cites W2094566035 @default.
- W2011109801 cites W2107136419 @default.
- W2011109801 cites W2113143314 @default.
- W2011109801 cites W2129523275 @default.
- W2011109801 cites W2131682353 @default.
- W2011109801 cites W2135511047 @default.
- W2011109801 cites W2147069407 @default.
- W2011109801 cites W2153476503 @default.
- W2011109801 cites W2154581660 @default.
- W2011109801 doi "https://doi.org/10.1080/10170669.2012.702135" @default.
- W2011109801 hasPublicationYear "2012" @default.
- W2011109801 type Work @default.
- W2011109801 sameAs 2011109801 @default.
- W2011109801 citedByCount "11" @default.
- W2011109801 countsByYear W20111098012013 @default.
- W2011109801 countsByYear W20111098012014 @default.
- W2011109801 countsByYear W20111098012015 @default.
- W2011109801 countsByYear W20111098012017 @default.
- W2011109801 countsByYear W20111098012018 @default.
- W2011109801 countsByYear W20111098012019 @default.
- W2011109801 countsByYear W20111098012021 @default.
- W2011109801 countsByYear W20111098012022 @default.
- W2011109801 crossrefType "journal-article" @default.
- W2011109801 hasAuthorship W2011109801A5020132059 @default.
- W2011109801 hasAuthorship W2011109801A5045919506 @default.
- W2011109801 hasAuthorship W2011109801A5047554774 @default.
- W2011109801 hasConcept C117671659 @default.
- W2011109801 hasConcept C119599485 @default.
- W2011109801 hasConcept C127413603 @default.
- W2011109801 hasConcept C13736549 @default.
- W2011109801 hasConcept C154945302 @default.
- W2011109801 hasConcept C160671074 @default.
- W2011109801 hasConcept C162324750 @default.
- W2011109801 hasConcept C26517878 @default.
- W2011109801 hasConcept C2775924081 @default.
- W2011109801 hasConcept C2780550144 @default.
- W2011109801 hasConcept C29825287 @default.
- W2011109801 hasConcept C38652104 @default.
- W2011109801 hasConcept C41008148 @default.
- W2011109801 hasConcept C50522688 @default.
- W2011109801 hasConcept C66018809 @default.
- W2011109801 hasConcept C76155785 @default.
- W2011109801 hasConceptScore W2011109801C117671659 @default.
- W2011109801 hasConceptScore W2011109801C119599485 @default.
- W2011109801 hasConceptScore W2011109801C127413603 @default.
- W2011109801 hasConceptScore W2011109801C13736549 @default.
- W2011109801 hasConceptScore W2011109801C154945302 @default.
- W2011109801 hasConceptScore W2011109801C160671074 @default.
- W2011109801 hasConceptScore W2011109801C162324750 @default.
- W2011109801 hasConceptScore W2011109801C26517878 @default.
- W2011109801 hasConceptScore W2011109801C2775924081 @default.
- W2011109801 hasConceptScore W2011109801C2780550144 @default.
- W2011109801 hasConceptScore W2011109801C29825287 @default.
- W2011109801 hasConceptScore W2011109801C38652104 @default.
- W2011109801 hasConceptScore W2011109801C41008148 @default.
- W2011109801 hasConceptScore W2011109801C50522688 @default.
- W2011109801 hasConceptScore W2011109801C66018809 @default.
- W2011109801 hasConceptScore W2011109801C76155785 @default.
- W2011109801 hasIssue "5" @default.
- W2011109801 hasLocation W20111098011 @default.
- W2011109801 hasOpenAccess W2011109801 @default.
- W2011109801 hasPrimaryLocation W20111098011 @default.
- W2011109801 hasRelatedWork W1534344224 @default.
- W2011109801 hasRelatedWork W1643531616 @default.
- W2011109801 hasRelatedWork W2011109801 @default.
- W2011109801 hasRelatedWork W2350003772 @default.
- W2011109801 hasRelatedWork W2351804707 @default.
- W2011109801 hasRelatedWork W2361830001 @default.
- W2011109801 hasRelatedWork W2367557013 @default.
- W2011109801 hasRelatedWork W2399146309 @default.
- W2011109801 hasRelatedWork W2576163978 @default.