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- W2011109872 abstract "The demand for high-aspect-ratio structures has been increasing in the field of semiconductors and other applications. Here, we present the commercially available negative-tone SU-8 as a potential resist that can be used for direct patterning of highaspect-ratio structures at the submicron scale and the nanoscale. Such resist patterns can be used as polymeric molds to create high-aspect-ratio metallic submicron and nanoscale structures by using electroplating. Compared with poly (methyl methacrylate) (PMMA), we found that the negative tone resist required an exposure dose that was less than that of PMMA of equal thickness by a factor of 100?150. Patterning of up to 4:1 aspect ratio SU-8 structures with a minimum feature size of 500 nm was demonstrated. In addition, nanoimprint lithography was studied to further extend the aspect ratio to realize a minimum feature size of less than 10 nm with an extremely high aspect ratio in the negative resist." @default.
- W2011109872 created "2016-06-24" @default.
- W2011109872 creator A5030655251 @default.
- W2011109872 creator A5060509698 @default.
- W2011109872 date "2015-03-31" @default.
- W2011109872 modified "2023-09-25" @default.
- W2011109872 title "High-Aspect-Ratio Nanoscale Patterning in a Negative Tone Photoresist" @default.
- W2011109872 cites W1989846617 @default.
- W2011109872 cites W1995660891 @default.
- W2011109872 cites W1999116811 @default.
- W2011109872 cites W2037537680 @default.
- W2011109872 cites W2080393159 @default.
- W2011109872 cites W2103114895 @default.
- W2011109872 cites W2135818056 @default.
- W2011109872 cites W2142303686 @default.
- W2011109872 cites W2143287675 @default.
- W2011109872 cites W2147077796 @default.
- W2011109872 doi "https://doi.org/10.6109/jicce.2015.13.1.056" @default.
- W2011109872 hasPublicationYear "2015" @default.
- W2011109872 type Work @default.
- W2011109872 sameAs 2011109872 @default.
- W2011109872 citedByCount "0" @default.
- W2011109872 crossrefType "journal-article" @default.
- W2011109872 hasAuthorship W2011109872A5030655251 @default.
- W2011109872 hasAuthorship W2011109872A5060509698 @default.
- W2011109872 hasBestOaLocation W20111098721 @default.
- W2011109872 hasConcept C134406635 @default.
- W2011109872 hasConcept C136525101 @default.
- W2011109872 hasConcept C142724271 @default.
- W2011109872 hasConcept C162117346 @default.
- W2011109872 hasConcept C171250308 @default.
- W2011109872 hasConcept C192562407 @default.
- W2011109872 hasConcept C204223013 @default.
- W2011109872 hasConcept C204787440 @default.
- W2011109872 hasConcept C2777046567 @default.
- W2011109872 hasConcept C2779227376 @default.
- W2011109872 hasConcept C45206210 @default.
- W2011109872 hasConcept C49040817 @default.
- W2011109872 hasConcept C51807945 @default.
- W2011109872 hasConcept C53524968 @default.
- W2011109872 hasConcept C71924100 @default.
- W2011109872 hasConcept C82558694 @default.
- W2011109872 hasConceptScore W2011109872C134406635 @default.
- W2011109872 hasConceptScore W2011109872C136525101 @default.
- W2011109872 hasConceptScore W2011109872C142724271 @default.
- W2011109872 hasConceptScore W2011109872C162117346 @default.
- W2011109872 hasConceptScore W2011109872C171250308 @default.
- W2011109872 hasConceptScore W2011109872C192562407 @default.
- W2011109872 hasConceptScore W2011109872C204223013 @default.
- W2011109872 hasConceptScore W2011109872C204787440 @default.
- W2011109872 hasConceptScore W2011109872C2777046567 @default.
- W2011109872 hasConceptScore W2011109872C2779227376 @default.
- W2011109872 hasConceptScore W2011109872C45206210 @default.
- W2011109872 hasConceptScore W2011109872C49040817 @default.
- W2011109872 hasConceptScore W2011109872C51807945 @default.
- W2011109872 hasConceptScore W2011109872C53524968 @default.
- W2011109872 hasConceptScore W2011109872C71924100 @default.
- W2011109872 hasConceptScore W2011109872C82558694 @default.
- W2011109872 hasLocation W20111098721 @default.
- W2011109872 hasOpenAccess W2011109872 @default.
- W2011109872 hasPrimaryLocation W20111098721 @default.
- W2011109872 hasRelatedWork W1966114321 @default.
- W2011109872 hasRelatedWork W1982352726 @default.
- W2011109872 hasRelatedWork W1982904495 @default.
- W2011109872 hasRelatedWork W1989220190 @default.
- W2011109872 hasRelatedWork W1992790986 @default.
- W2011109872 hasRelatedWork W2002752212 @default.
- W2011109872 hasRelatedWork W2003164958 @default.
- W2011109872 hasRelatedWork W2010959215 @default.
- W2011109872 hasRelatedWork W2021710080 @default.
- W2011109872 hasRelatedWork W2024983953 @default.
- W2011109872 hasRelatedWork W2029497000 @default.
- W2011109872 hasRelatedWork W2054460607 @default.
- W2011109872 hasRelatedWork W2063959344 @default.
- W2011109872 hasRelatedWork W2089490419 @default.
- W2011109872 hasRelatedWork W2093531034 @default.
- W2011109872 hasRelatedWork W2305857456 @default.
- W2011109872 hasRelatedWork W2309649693 @default.
- W2011109872 hasRelatedWork W2312692142 @default.
- W2011109872 hasRelatedWork W2321868400 @default.
- W2011109872 hasRelatedWork W2938683210 @default.
- W2011109872 isParatext "false" @default.
- W2011109872 isRetracted "false" @default.
- W2011109872 magId "2011109872" @default.
- W2011109872 workType "article" @default.