Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011222015> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2011222015 abstract "We report results of theoretical modeling into a scatterometry-based method relevant to overlay measurement. A set of two array targets were designed with intentional offsets difference, d and d+20 nm, between the top and bottom grid arrays along the X and Y directions. The correlation of bi-azimuth measurements is the first critical issue been taken into account. The method linearizes the differential values of scatterometry signatures at the first diffraction order with respect to designed offsets, and hence permits determination of overlay using a classical linear method. By evaluating the process variations (eg. CD, roundness and thickness) on overlay measurement error, a set of two overlay target design were optimized to minimize the correlation of bi-azimuth measurements and maximize the measurement sensitivity." @default.
- W2011222015 created "2016-06-24" @default.
- W2011222015 creator A5012746533 @default.
- W2011222015 creator A5035425988 @default.
- W2011222015 creator A5065933852 @default.
- W2011222015 creator A5076227150 @default.
- W2011222015 date "2009-08-20" @default.
- W2011222015 modified "2023-09-23" @default.
- W2011222015 title "Improved diffraction-based overlay metrology by use of two dimensional array target" @default.
- W2011222015 cites W1972920931 @default.
- W2011222015 cites W1976132400 @default.
- W2011222015 cites W1980499836 @default.
- W2011222015 cites W1983648052 @default.
- W2011222015 cites W2002190158 @default.
- W2011222015 cites W2013592720 @default.
- W2011222015 cites W2014687444 @default.
- W2011222015 cites W2038214295 @default.
- W2011222015 cites W2041091255 @default.
- W2011222015 cites W2054337187 @default.
- W2011222015 cites W2063966852 @default.
- W2011222015 cites W2074169911 @default.
- W2011222015 cites W2097875806 @default.
- W2011222015 cites W2125843398 @default.
- W2011222015 cites W2166010701 @default.
- W2011222015 doi "https://doi.org/10.1117/12.825524" @default.
- W2011222015 hasPublicationYear "2009" @default.
- W2011222015 type Work @default.
- W2011222015 sameAs 2011222015 @default.
- W2011222015 citedByCount "0" @default.
- W2011222015 crossrefType "proceedings-article" @default.
- W2011222015 hasAuthorship W2011222015A5012746533 @default.
- W2011222015 hasAuthorship W2011222015A5035425988 @default.
- W2011222015 hasAuthorship W2011222015A5065933852 @default.
- W2011222015 hasAuthorship W2011222015A5076227150 @default.
- W2011222015 hasConcept C11413529 @default.
- W2011222015 hasConcept C120665830 @default.
- W2011222015 hasConcept C121332964 @default.
- W2011222015 hasConcept C127313418 @default.
- W2011222015 hasConcept C13280743 @default.
- W2011222015 hasConcept C136085584 @default.
- W2011222015 hasConcept C159737794 @default.
- W2011222015 hasConcept C177264268 @default.
- W2011222015 hasConcept C187691185 @default.
- W2011222015 hasConcept C195766429 @default.
- W2011222015 hasConcept C199360897 @default.
- W2011222015 hasConcept C207114421 @default.
- W2011222015 hasConcept C41008148 @default.
- W2011222015 hasConceptScore W2011222015C11413529 @default.
- W2011222015 hasConceptScore W2011222015C120665830 @default.
- W2011222015 hasConceptScore W2011222015C121332964 @default.
- W2011222015 hasConceptScore W2011222015C127313418 @default.
- W2011222015 hasConceptScore W2011222015C13280743 @default.
- W2011222015 hasConceptScore W2011222015C136085584 @default.
- W2011222015 hasConceptScore W2011222015C159737794 @default.
- W2011222015 hasConceptScore W2011222015C177264268 @default.
- W2011222015 hasConceptScore W2011222015C187691185 @default.
- W2011222015 hasConceptScore W2011222015C195766429 @default.
- W2011222015 hasConceptScore W2011222015C199360897 @default.
- W2011222015 hasConceptScore W2011222015C207114421 @default.
- W2011222015 hasConceptScore W2011222015C41008148 @default.
- W2011222015 hasLocation W20112220151 @default.
- W2011222015 hasOpenAccess W2011222015 @default.
- W2011222015 hasPrimaryLocation W20112220151 @default.
- W2011222015 hasRelatedWork W1965479234 @default.
- W2011222015 hasRelatedWork W1972920931 @default.
- W2011222015 hasRelatedWork W1975198023 @default.
- W2011222015 hasRelatedWork W1976132400 @default.
- W2011222015 hasRelatedWork W2028127906 @default.
- W2011222015 hasRelatedWork W2040447550 @default.
- W2011222015 hasRelatedWork W2055072166 @default.
- W2011222015 hasRelatedWork W2059878712 @default.
- W2011222015 hasRelatedWork W2075787934 @default.
- W2011222015 hasRelatedWork W2084796681 @default.
- W2011222015 hasRelatedWork W2085584482 @default.
- W2011222015 hasRelatedWork W2116489743 @default.
- W2011222015 hasRelatedWork W2172065064 @default.
- W2011222015 hasRelatedWork W2178575460 @default.
- W2011222015 hasRelatedWork W2318117916 @default.
- W2011222015 hasRelatedWork W2784826524 @default.
- W2011222015 hasRelatedWork W297943691 @default.
- W2011222015 hasRelatedWork W2995872795 @default.
- W2011222015 hasRelatedWork W3121073305 @default.
- W2011222015 hasRelatedWork W3152645001 @default.
- W2011222015 isParatext "false" @default.
- W2011222015 isRetracted "false" @default.
- W2011222015 magId "2011222015" @default.
- W2011222015 workType "article" @default.