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- W2011244186 abstract "ABSTRACT Amorphous Diamond like carbon (DLC) thin films were deposited on to 4-silicon wafers by an electron cyclotron reso-nance (ECR) microwave excited methan (CH4) or ethin (C2H2) plasma at low pressure. Electronic characterization of DLCfilms were performed by I/V and C/V measurements using MIS-structures. Whereas the electrochemical pH-characteristicswere measured using ion-sensitive field-effect transistors (ISFET). It is shown, that the type of carrier transport mechanismin DLC films depends on the process conditions and that the electrical conductivity varies over a wide range. This can beadjusted mainly by the kinetic energy ofthe CXHX ions and the C to H ratio, which depends on the type ofprocess gas. Thedominant charge transport mechanism in DLC films based on a methan plasma is the Poole-Frenkel emission whereas thecharge flow for ethin based DLC films is space-charge limited. The electronic conductivity of DLC films deposited withethin as process gas is typically about five orders of magnitude higher than methan based films. The electrochernical char-acterization shows a pH-sensitivity in the range of 50-57 mV/pH and a long-term pH signal stability in the range of 0.3-25" @default.
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- W2011244186 date "1998-12-18" @default.
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- W2011244186 title "<title>Electronic characterization of thin diamondlike carbon films for pH sensor applications</title>" @default.
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- W2011244186 doi "https://doi.org/10.1117/12.333742" @default.
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