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- W2011275689 abstract "We demonstrate 100-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at extreme-UV (EUV) wavelengths, using synchrotron-based illumination. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point-diffraction interferometer recently developed at Lawrence Berkeley National Laboratory. Here we introduce the idea of the holographic aerial image-recording technique and present imaging performance characterization results for a 10x Schwarzschild objective, a prototype EUV lithographic optic. The results are compared with simulations, and good agreement is obtained. Various object patterns, including phase-shift-enhanced patterns, have been studied. Finally, the application of the holographic aerial image-recording technique to EUV multilayer mask-blank defect characterization is discussed." @default.
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- W2011275689 date "2001-06-01" @default.
- W2011275689 modified "2023-09-25" @default.
- W2011275689 title "Extreme-ultraviolet lensless Fourier-transform holography" @default.
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- W2011275689 doi "https://doi.org/10.1364/ao.40.002655" @default.
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