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- W2011292188 abstract "A ne optical microlithography - optical holographic microlithography is described in the paper. The primary principle, hologram repositioning, main advantages, basic applications and some experimental system aspects of the optical holographic microlithography are also described." @default.
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- W2011292188 date "2000-07-05" @default.
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- W2011292188 title "Optical holography used in optical microlithography" @default.
- W2011292188 doi "https://doi.org/10.1117/12.389082" @default.
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