FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011305422> ?p ?o ?g. }

• W2011305422 abstract "CVD-Ru based reflow Cu scheme demonstrates robust gap fill performance at 10nm and 7nm node equivalent patterns. Potential EM and TDDB reliability concerns associated with Ru CMP are identified and successfully addressed by the application of new processes and materials. This suggests our proposed scheme can be one of promising candidates for 10nm node logic device and beyond." @default.
• W2011305422 created "2016-06-24" @default.
• W2011305422 creator A5002794635 @default.
• W2011305422 creator A5003755150 @default.
• W2011305422 creator A5006513502 @default.
• W2011305422 creator A5008349599 @default.
• W2011305422 creator A5010849844 @default.
• W2011305422 creator A5014922084 @default.
• W2011305422 creator A5019681917 @default.
• W2011305422 creator A5022940171 @default.
• W2011305422 creator A5028777326 @default.
• W2011305422 creator A5031789035 @default.
• W2011305422 creator A5032903407 @default.
• W2011305422 creator A5034303126 @default.
• W2011305422 creator A5039586714 @default.
• W2011305422 creator A5041025746 @default.
• W2011305422 creator A5041273894 @default.
• W2011305422 creator A5041452995 @default.
• W2011305422 creator A5042246514 @default.
• W2011305422 creator A5052045405 @default.
• W2011305422 creator A5052907131 @default.
• W2011305422 creator A5056216676 @default.
• W2011305422 creator A5058220462 @default.
• W2011305422 creator A5062852993 @default.
• W2011305422 creator A5063521444 @default.
• W2011305422 creator A5071678015 @default.
• W2011305422 creator A5073341790 @default.
• W2011305422 creator A5086376189 @default.
• W2011305422 creator A5089254596 @default.
• W2011305422 creator A5091565105 @default.
• W2011305422 date "2015-05-01" @default.
• W2011305422 modified "2023-09-26" @default.
• W2011305422 title "High performance Cu/low-k interconnect strategy beyond 10nm logic technology" @default.
• W2011305422 cites W2015143446 @default.
• W2011305422 cites W2020162412 @default.
• W2011305422 cites W2026831964 @default.
• W2011305422 cites W2031535982 @default.
• W2011305422 doi "https://doi.org/10.1109/iitc-mam.2015.7325599" @default.
• W2011305422 hasPublicationYear "2015" @default.
• W2011305422 type Work @default.
• W2011305422 sameAs 2011305422 @default.
• W2011305422 citedByCount "1" @default.
• W2011305422 countsByYear W20113054222017 @default.
• W2011305422 crossrefType "proceedings-article" @default.
• W2011305422 hasAuthorship W2011305422A5002794635 @default.
• W2011305422 hasAuthorship W2011305422A5003755150 @default.
• W2011305422 hasAuthorship W2011305422A5006513502 @default.
• W2011305422 hasAuthorship W2011305422A5008349599 @default.
• W2011305422 hasAuthorship W2011305422A5010849844 @default.
• W2011305422 hasAuthorship W2011305422A5014922084 @default.
• W2011305422 hasAuthorship W2011305422A5019681917 @default.
• W2011305422 hasAuthorship W2011305422A5022940171 @default.
• W2011305422 hasAuthorship W2011305422A5028777326 @default.
• W2011305422 hasAuthorship W2011305422A5031789035 @default.
• W2011305422 hasAuthorship W2011305422A5032903407 @default.
• W2011305422 hasAuthorship W2011305422A5034303126 @default.
• W2011305422 hasAuthorship W2011305422A5039586714 @default.
• W2011305422 hasAuthorship W2011305422A5041025746 @default.
• W2011305422 hasAuthorship W2011305422A5041273894 @default.
• W2011305422 hasAuthorship W2011305422A5041452995 @default.
• W2011305422 hasAuthorship W2011305422A5042246514 @default.
• W2011305422 hasAuthorship W2011305422A5052045405 @default.
• W2011305422 hasAuthorship W2011305422A5052907131 @default.
• W2011305422 hasAuthorship W2011305422A5056216676 @default.
• W2011305422 hasAuthorship W2011305422A5058220462 @default.
• W2011305422 hasAuthorship W2011305422A5062852993 @default.
• W2011305422 hasAuthorship W2011305422A5063521444 @default.
• W2011305422 hasAuthorship W2011305422A5071678015 @default.
• W2011305422 hasAuthorship W2011305422A5073341790 @default.
• W2011305422 hasAuthorship W2011305422A5086376189 @default.
• W2011305422 hasAuthorship W2011305422A5089254596 @default.
• W2011305422 hasAuthorship W2011305422A5091565105 @default.
• W2011305422 hasConcept C119599485 @default.
• W2011305422 hasConcept C121332964 @default.
• W2011305422 hasConcept C123745756 @default.
• W2011305422 hasConcept C127413603 @default.
• W2011305422 hasConcept C131017901 @default.
• W2011305422 hasConcept C134306372 @default.
• W2011305422 hasConcept C152909973 @default.
• W2011305422 hasConcept C163258240 @default.
• W2011305422 hasConcept C165801399 @default.
• W2011305422 hasConcept C172385210 @default.
• W2011305422 hasConcept C192562407 @default.
• W2011305422 hasConcept C200601418 @default.
• W2011305422 hasConcept C2361726 @default.
• W2011305422 hasConcept C24326235 @default.
• W2011305422 hasConcept C31258907 @default.
• W2011305422 hasConcept C33923547 @default.
• W2011305422 hasConcept C41008148 @default.
• W2011305422 hasConcept C43214815 @default.
• W2011305422 hasConcept C62520636 @default.
• W2011305422 hasConcept C62611344 @default.
• W2011305422 hasConcept C66938386 @default.
• W2011305422 hasConcept C77618280 @default.
• W2011305422 hasConceptScore W2011305422C119599485 @default.
• W2011305422 hasConceptScore W2011305422C121332964 @default.
• W2011305422 hasConceptScore W2011305422C123745756 @default.
• W2011305422 hasConceptScore W2011305422C127413603 @default.
• W2011305422 hasConceptScore W2011305422C131017901 @default.
• W2011305422 hasConceptScore W2011305422C134306372 @default.

• next