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- W2011333529 abstract "To increase the CD uniformity and throughput of SLM-based maskless lithography, the delta lithography method (DLM) has been developed. The basic idea of the DLM is to create a delta configuration by using a rectangular point array. The DLM enables irradiation in a honeycomb structure with equilateral triangles or a square structure with right-angled isosceles triangles. To verify the DLM, lithography simulations and a lithography experiment to fabricate a photomask were performed. The pattern appeared to be well defined with extremely low LER. The potential of the DLM to increase the CD uniformity and throughput is confirmed." @default.
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- W2011333529 date "2010-05-01" @default.
- W2011333529 modified "2023-09-26" @default.
- W2011333529 title "Delta lithography method to increase CD uniformity and throughput of SLM-based maskless lithography" @default.
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- W2011333529 doi "https://doi.org/10.1016/j.mee.2009.10.053" @default.
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