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- W2011394519 abstract "The transmission electron microscopy (TEM) and high resolution electron microscopy (HREM) are frequently applied for defects and failures ULCI analysis. The preparation of the electron transparent big area flat- parallel semiconductor thin films is needed. The simple and speed automated method of the thin films (less 10 micrometers ) and cross-sections of the multilayer semiconductor structures and devices preparation is described in this paper. It is based on the mechanical and chem- mechanical grinding and polishing of the semiconductor sample with a free abrasive. This method allows to form the flat-parallel and composition uniform thin films with electron transparent area more that 2 mm<SUP>2</SUP> after ion-etching treatment. The original equipment which consists of a local treatment unit, planar treatment unit and wire saw unit is developed." @default.
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- W2011394519 date "1995-09-19" @default.
- W2011394519 modified "2023-09-23" @default.
- W2011394519 title "<title>Method of multilayer semiconductor structures cross section preparation for transmission electron microscopy</title>" @default.
- W2011394519 doi "https://doi.org/10.1117/12.221316" @default.
- W2011394519 hasPublicationYear "1995" @default.
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