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- W2011432624 abstract "This paper presents a micromachined claw probe with electroplating nickel for micro-solder ball electrical testing applications. The suspension claw structure consists of two bridges and four curved cantilevers, which have a flexible spring constant in a small region. The typical bending cantilever structure, made by nickel electroplating, had a thickness of 6.5μm, a width of 10μm and a length of 80μm. The maximum out-of-plane deflections of the fabricated 40×40 claw-probe array were approximately 50μm, under the effect of residual tensile stress. For the probing test of the micro-solder ball with diameter 200μm, the contact resistance was about 20Ω when the contact force was 6.7mN." @default.
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- W2011432624 date "2012-01-01" @default.
- W2011432624 modified "2023-10-16" @default.
- W2011432624 title "A claw type of MEMS probe card for the electrical testing of micro-solder ball" @default.
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- W2011432624 doi "https://doi.org/10.1109/memsys.2012.6170206" @default.
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