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• W2011578068 abstract "Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Kenji Furuya, Akihiro Ide, Akira Harata; Mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CH4 plasmas. J. Appl. Phys. 1 July 2011; 110 (1): 013304. https://doi.org/10.1063/1.3605543 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioJournal of Applied Physics Search Advanced Search |Citation Search" @default.
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• W2011578068 title "Mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CH₄ plasmas" @default.
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