Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011640151> ?p ?o ?g. }
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97
with 100 items per page.
- W2011640151 endingPage "45" @default.
- W2011640151 startingPage "41" @default.
- W2011640151 abstract "This work provides an experimental insight into some physical mechanisms involved in the diffusion of arsenic and boron in polysilicon/monocrystalline Si bilayers, during the formation of shallow N+ emitters for the BiCMOS technology. The RTA-induced redistribution of As or B, so as As and B successively implanted in a 380 nm LPCVD polysilicon layer has been studied by SIMS measurements. The key idea in this paper is to perform annealings under an inert or an oxidizing ambient, in a way to put in evidence not only that arsenic diffuses along grain boundaries, but also that boron diffuses into the grain boundaries or in the grain and also in the neighbourhood of boundaries. As a consequence, in the underlying single crystal, arsenic and boron are deeper with a rapid thermal annealing under an inert atmosphere compared with a rapid thermal oxidation. A new model for impurities diffusivities have been initiated in order to take into account these phenomenon." @default.
- W2011640151 created "2016-06-24" @default.
- W2011640151 creator A5054700804 @default.
- W2011640151 creator A5064614978 @default.
- W2011640151 creator A5066624424 @default.
- W2011640151 creator A5079734522 @default.
- W2011640151 date "1996-03-01" @default.
- W2011640151 modified "2023-09-25" @default.
- W2011640151 title "About boron and arsenic diffusions in polycrystalline silicon under rapid thermal oxidation" @default.
- W2011640151 cites W1991670551 @default.
- W2011640151 cites W2013634243 @default.
- W2011640151 cites W2029085138 @default.
- W2011640151 cites W2054858723 @default.
- W2011640151 cites W2060275815 @default.
- W2011640151 cites W2063126213 @default.
- W2011640151 cites W2069563495 @default.
- W2011640151 cites W2088572282 @default.
- W2011640151 doi "https://doi.org/10.1016/0921-5107(95)01503-5" @default.
- W2011640151 hasPublicationYear "1996" @default.
- W2011640151 type Work @default.
- W2011640151 sameAs 2011640151 @default.
- W2011640151 citedByCount "2" @default.
- W2011640151 countsByYear W20116401512013 @default.
- W2011640151 crossrefType "journal-article" @default.
- W2011640151 hasAuthorship W2011640151A5054700804 @default.
- W2011640151 hasAuthorship W2011640151A5064614978 @default.
- W2011640151 hasAuthorship W2011640151A5066624424 @default.
- W2011640151 hasAuthorship W2011640151A5079734522 @default.
- W2011640151 hasConcept C127413603 @default.
- W2011640151 hasConcept C154256306 @default.
- W2011640151 hasConcept C171250308 @default.
- W2011640151 hasConcept C17744445 @default.
- W2011640151 hasConcept C178790620 @default.
- W2011640151 hasConcept C185592680 @default.
- W2011640151 hasConcept C191897082 @default.
- W2011640151 hasConcept C192562407 @default.
- W2011640151 hasConcept C199539241 @default.
- W2011640151 hasConcept C2777855556 @default.
- W2011640151 hasConcept C2779227376 @default.
- W2011640151 hasConcept C2779281663 @default.
- W2011640151 hasConcept C2780565262 @default.
- W2011640151 hasConcept C42360764 @default.
- W2011640151 hasConcept C47908070 @default.
- W2011640151 hasConcept C501308230 @default.
- W2011640151 hasConcept C502230775 @default.
- W2011640151 hasConcept C544956773 @default.
- W2011640151 hasConcept C71987851 @default.
- W2011640151 hasConcept C74080474 @default.
- W2011640151 hasConcept C77176794 @default.
- W2011640151 hasConcept C87359718 @default.
- W2011640151 hasConcept C87976508 @default.
- W2011640151 hasConcept C94625758 @default.
- W2011640151 hasConceptScore W2011640151C127413603 @default.
- W2011640151 hasConceptScore W2011640151C154256306 @default.
- W2011640151 hasConceptScore W2011640151C171250308 @default.
- W2011640151 hasConceptScore W2011640151C17744445 @default.
- W2011640151 hasConceptScore W2011640151C178790620 @default.
- W2011640151 hasConceptScore W2011640151C185592680 @default.
- W2011640151 hasConceptScore W2011640151C191897082 @default.
- W2011640151 hasConceptScore W2011640151C192562407 @default.
- W2011640151 hasConceptScore W2011640151C199539241 @default.
- W2011640151 hasConceptScore W2011640151C2777855556 @default.
- W2011640151 hasConceptScore W2011640151C2779227376 @default.
- W2011640151 hasConceptScore W2011640151C2779281663 @default.
- W2011640151 hasConceptScore W2011640151C2780565262 @default.
- W2011640151 hasConceptScore W2011640151C42360764 @default.
- W2011640151 hasConceptScore W2011640151C47908070 @default.
- W2011640151 hasConceptScore W2011640151C501308230 @default.
- W2011640151 hasConceptScore W2011640151C502230775 @default.
- W2011640151 hasConceptScore W2011640151C544956773 @default.
- W2011640151 hasConceptScore W2011640151C71987851 @default.
- W2011640151 hasConceptScore W2011640151C74080474 @default.
- W2011640151 hasConceptScore W2011640151C77176794 @default.
- W2011640151 hasConceptScore W2011640151C87359718 @default.
- W2011640151 hasConceptScore W2011640151C87976508 @default.
- W2011640151 hasConceptScore W2011640151C94625758 @default.
- W2011640151 hasIssue "1-2" @default.
- W2011640151 hasLocation W20116401511 @default.
- W2011640151 hasOpenAccess W2011640151 @default.
- W2011640151 hasPrimaryLocation W20116401511 @default.
- W2011640151 hasRelatedWork W1982584359 @default.
- W2011640151 hasRelatedWork W2016207123 @default.
- W2011640151 hasRelatedWork W2034274768 @default.
- W2011640151 hasRelatedWork W2060177406 @default.
- W2011640151 hasRelatedWork W2062348164 @default.
- W2011640151 hasRelatedWork W2062904732 @default.
- W2011640151 hasRelatedWork W2073596908 @default.
- W2011640151 hasRelatedWork W2275386326 @default.
- W2011640151 hasRelatedWork W4226067300 @default.
- W2011640151 hasRelatedWork W793081105 @default.
- W2011640151 hasVolume "38" @default.
- W2011640151 isParatext "false" @default.
- W2011640151 isRetracted "false" @default.
- W2011640151 magId "2011640151" @default.
- W2011640151 workType "article" @default.