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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011732997> ?p ?o ?g. }

• W2011732997 endingPage "326" @default.
• W2011732997 startingPage "319" @default.
• W2011732997 abstract "Silicon samples were gold-diffused at different temperatures (870–950 °C) and implanted with He ions at 1.6 MeV and fluences ranging from 2 × 1016 up to 1017 cm—2. The implantation induced defects observed by conventional and high resolution cross section electron microscopy were found to be essentially cavities 10 to 100 nm in size which are faceted mainly along {111}, but also along {110} and {100} planes. The cavities are located at the sample depth predicted by the transport range of ions in matter simulation. Secondary ion mass spectroscopy profiles exhibit a shouldered shape with a maximum at the projected range. They demonstrate that the cavities are very efficient sinks for Au atoms; the shoulder of the profile could be related to the presence of smaller cavities and dislocations in the vicinity of the projected range. Gold concentration in the cavity area was below the detection limit of the energy dispersive spectroscopy technique, but both Cu and Ni contamination gave rise to silicides and could be chemically analysed. Cu3Si precipitates have grown in cavities as already reported in the literature, while NiSi2 precipitates were observed for the first time in cavities." @default.
• W2011732997 created "2016-06-24" @default.
• W2011732997 creator A5007668559 @default.
• W2011732997 creator A5031705640 @default.
• W2011732997 creator A5034260619 @default.
• W2011732997 creator A5043190448 @default.
• W2011732997 creator A5049621955 @default.
• W2011732997 creator A5091790985 @default.
• W2011732997 date "2000-11-01" @default.
• W2011732997 modified "2023-09-25" @default.
• W2011732997 title "Gettering of Diffused Au and of Cu and Ni Contamination in Silicon by Cavities Induced by High Energy He Implantation" @default.
• W2011732997 cites W1900220030 @default.
• W2011732997 cites W1965162636 @default.
• W2011732997 cites W1975607009 @default.
• W2011732997 cites W1995095851 @default.
• W2011732997 cites W1996814031 @default.
• W2011732997 cites W2021839761 @default.
• W2011732997 cites W2022473496 @default.
• W2011732997 cites W2022835848 @default.
• W2011732997 cites W2024398184 @default.
• W2011732997 cites W2042484410 @default.
• W2011732997 cites W2051801112 @default.
• W2011732997 cites W2062481900 @default.
• W2011732997 cites W2079938205 @default.
• W2011732997 cites W2087980276 @default.
• W2011732997 cites W2089566563 @default.
• W2011732997 cites W2094348145 @default.
• W2011732997 doi "https://doi.org/10.1002/1521-3951(200011)222:1<319::aid-pssb319>3.0.co;2-q" @default.
• W2011732997 hasPublicationYear "2000" @default.
• W2011732997 type Work @default.
• W2011732997 sameAs 2011732997 @default.
• W2011732997 citedByCount "15" @default.
• W2011732997 countsByYear W20117329972012 @default.
• W2011732997 countsByYear W20117329972016 @default.
• W2011732997 countsByYear W20117329972020 @default.
• W2011732997 crossrefType "journal-article" @default.
• W2011732997 hasAuthorship W2011732997A5007668559 @default.
• W2011732997 hasAuthorship W2011732997A5031705640 @default.
• W2011732997 hasAuthorship W2011732997A5034260619 @default.
• W2011732997 hasAuthorship W2011732997A5043190448 @default.
• W2011732997 hasAuthorship W2011732997A5049621955 @default.
• W2011732997 hasAuthorship W2011732997A5091790985 @default.
• W2011732997 hasConcept C112570922 @default.
• W2011732997 hasConcept C113196181 @default.
• W2011732997 hasConcept C121332964 @default.
• W2011732997 hasConcept C125099081 @default.
• W2011732997 hasConcept C145148216 @default.
• W2011732997 hasConcept C159985019 @default.
• W2011732997 hasConcept C178790620 @default.
• W2011732997 hasConcept C185592680 @default.
• W2011732997 hasConcept C18903297 @default.
• W2011732997 hasConcept C192562407 @default.
• W2011732997 hasConcept C204323151 @default.
• W2011732997 hasConcept C2909539053 @default.
• W2011732997 hasConcept C32891209 @default.
• W2011732997 hasConcept C41823505 @default.
• W2011732997 hasConcept C43617362 @default.
• W2011732997 hasConcept C49040817 @default.
• W2011732997 hasConcept C544956773 @default.
• W2011732997 hasConcept C62520636 @default.
• W2011732997 hasConcept C86803240 @default.
• W2011732997 hasConceptScore W2011732997C112570922 @default.
• W2011732997 hasConceptScore W2011732997C113196181 @default.
• W2011732997 hasConceptScore W2011732997C121332964 @default.
• W2011732997 hasConceptScore W2011732997C125099081 @default.
• W2011732997 hasConceptScore W2011732997C145148216 @default.
• W2011732997 hasConceptScore W2011732997C159985019 @default.
• W2011732997 hasConceptScore W2011732997C178790620 @default.
• W2011732997 hasConceptScore W2011732997C185592680 @default.
• W2011732997 hasConceptScore W2011732997C18903297 @default.
• W2011732997 hasConceptScore W2011732997C192562407 @default.
• W2011732997 hasConceptScore W2011732997C204323151 @default.
• W2011732997 hasConceptScore W2011732997C2909539053 @default.
• W2011732997 hasConceptScore W2011732997C32891209 @default.
• W2011732997 hasConceptScore W2011732997C41823505 @default.
• W2011732997 hasConceptScore W2011732997C43617362 @default.
• W2011732997 hasConceptScore W2011732997C49040817 @default.
• W2011732997 hasConceptScore W2011732997C544956773 @default.
• W2011732997 hasConceptScore W2011732997C62520636 @default.
• W2011732997 hasConceptScore W2011732997C86803240 @default.
• W2011732997 hasIssue "1" @default.
• W2011732997 hasLocation W20117329971 @default.
• W2011732997 hasOpenAccess W2011732997 @default.
• W2011732997 hasPrimaryLocation W20117329971 @default.
• W2011732997 hasRelatedWork W1975617096 @default.
• W2011732997 hasRelatedWork W1992248992 @default.
• W2011732997 hasRelatedWork W1999276122 @default.
• W2011732997 hasRelatedWork W2053735234 @default.
• W2011732997 hasRelatedWork W2060651870 @default.
• W2011732997 hasRelatedWork W2070194322 @default.
• W2011732997 hasRelatedWork W2088081281 @default.
• W2011732997 hasRelatedWork W2105737714 @default.
• W2011732997 hasRelatedWork W3101130858 @default.
• W2011732997 hasRelatedWork W72480588 @default.
• W2011732997 hasVolume "222" @default.
• W2011732997 isParatext "false" @default.
• W2011732997 isRetracted "false" @default.
• W2011732997 magId "2011732997" @default.

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