Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011954481> ?p ?o ?g. }
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- W2011954481 endingPage "921" @default.
- W2011954481 startingPage "915" @default.
- W2011954481 abstract "The combined effect of varying the hydrogen and oxygen impurities in the silicon nitride film of metal-nitride-oxide-semiconductor (NOS) devices was studied to develop a correlation among the chemical composition, current conduction, charge trapping, and memory properties of the devices. The atomic percentage of hydrogen increased in the film as a function of decreasing deposition temperature from 850 to 650 o C. Oxygen was incorporated into the film by replacing nitrogen atoms through the use of nitrous oxide gas during the film deposition process. The addition of oxygen further reduced the hydrogen concentration in the fim" @default.
- W2011954481 created "2016-06-24" @default.
- W2011954481 creator A5003697180 @default.
- W2011954481 creator A5050437948 @default.
- W2011954481 creator A5066881341 @default.
- W2011954481 creator A5070405387 @default.
- W2011954481 date "1992-03-01" @default.
- W2011954481 modified "2023-10-06" @default.
- W2011954481 title "The Combined Effect of Hydrogen and Oxygen Impurities in the Silicon Nitride Film of MNOS Devices" @default.
- W2011954481 doi "https://doi.org/10.1149/1.2069324" @default.
- W2011954481 hasPublicationYear "1992" @default.
- W2011954481 type Work @default.
- W2011954481 sameAs 2011954481 @default.
- W2011954481 citedByCount "9" @default.
- W2011954481 crossrefType "journal-article" @default.
- W2011954481 hasAuthorship W2011954481A5003697180 @default.
- W2011954481 hasAuthorship W2011954481A5050437948 @default.
- W2011954481 hasAuthorship W2011954481A5066881341 @default.
- W2011954481 hasAuthorship W2011954481A5070405387 @default.
- W2011954481 hasConcept C127413603 @default.
- W2011954481 hasConcept C171250308 @default.
- W2011954481 hasConcept C178790620 @default.
- W2011954481 hasConcept C185592680 @default.
- W2011954481 hasConcept C192562407 @default.
- W2011954481 hasConcept C194760766 @default.
- W2011954481 hasConcept C2777431650 @default.
- W2011954481 hasConcept C2779227376 @default.
- W2011954481 hasConcept C49040817 @default.
- W2011954481 hasConcept C512968161 @default.
- W2011954481 hasConcept C540031477 @default.
- W2011954481 hasConcept C544956773 @default.
- W2011954481 hasConcept C61696701 @default.
- W2011954481 hasConcept C71987851 @default.
- W2011954481 hasConceptScore W2011954481C127413603 @default.
- W2011954481 hasConceptScore W2011954481C171250308 @default.
- W2011954481 hasConceptScore W2011954481C178790620 @default.
- W2011954481 hasConceptScore W2011954481C185592680 @default.
- W2011954481 hasConceptScore W2011954481C192562407 @default.
- W2011954481 hasConceptScore W2011954481C194760766 @default.
- W2011954481 hasConceptScore W2011954481C2777431650 @default.
- W2011954481 hasConceptScore W2011954481C2779227376 @default.
- W2011954481 hasConceptScore W2011954481C49040817 @default.
- W2011954481 hasConceptScore W2011954481C512968161 @default.
- W2011954481 hasConceptScore W2011954481C540031477 @default.
- W2011954481 hasConceptScore W2011954481C544956773 @default.
- W2011954481 hasConceptScore W2011954481C61696701 @default.
- W2011954481 hasConceptScore W2011954481C71987851 @default.
- W2011954481 hasIssue "3" @default.
- W2011954481 hasLocation W20119544811 @default.
- W2011954481 hasOpenAccess W2011954481 @default.
- W2011954481 hasPrimaryLocation W20119544811 @default.
- W2011954481 hasRelatedWork W1971232384 @default.
- W2011954481 hasRelatedWork W2002070225 @default.
- W2011954481 hasRelatedWork W2012686968 @default.
- W2011954481 hasRelatedWork W2035731180 @default.
- W2011954481 hasRelatedWork W2042100673 @default.
- W2011954481 hasRelatedWork W2057457139 @default.
- W2011954481 hasRelatedWork W2066338197 @default.
- W2011954481 hasRelatedWork W2322240380 @default.
- W2011954481 hasRelatedWork W4248171292 @default.
- W2011954481 hasRelatedWork W4321248201 @default.
- W2011954481 hasVolume "139" @default.
- W2011954481 isParatext "false" @default.
- W2011954481 isRetracted "false" @default.
- W2011954481 magId "2011954481" @default.
- W2011954481 workType "article" @default.