Matches in SemOpenAlex for { <https://semopenalex.org/work/W2011972878> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2011972878 endingPage "1030" @default.
- W2011972878 startingPage "1027" @default.
- W2011972878 abstract "In this paper we present the passivation of zinc oxide by a thin silicon nitride layer. With this passivation, silicon wafers covered with zinc oxide can be further processed without contamination of the process chambers of the subsequent processes, and without damaging the zinc oxide layer. In addition, we review some process technology concerning zinc oxide: the cleaning and etching of zinc oxide and the etching of aluminium on zinc oxide." @default.
- W2011972878 created "2016-06-24" @default.
- W2011972878 creator A5015543871 @default.
- W2011972878 creator A5021116601 @default.
- W2011972878 creator A5064630364 @default.
- W2011972878 creator A5082168482 @default.
- W2011972878 date "1990-04-01" @default.
- W2011972878 modified "2023-10-01" @default.
- W2011972878 title "Compatibility of zinc oxide with silicon IC processing" @default.
- W2011972878 cites W1998624653 @default.
- W2011972878 cites W2093613144 @default.
- W2011972878 cites W2094175229 @default.
- W2011972878 doi "https://doi.org/10.1016/0924-4247(90)87083-u" @default.
- W2011972878 hasPublicationYear "1990" @default.
- W2011972878 type Work @default.
- W2011972878 sameAs 2011972878 @default.
- W2011972878 citedByCount "80" @default.
- W2011972878 countsByYear W20119728782012 @default.
- W2011972878 countsByYear W20119728782013 @default.
- W2011972878 countsByYear W20119728782014 @default.
- W2011972878 countsByYear W20119728782015 @default.
- W2011972878 countsByYear W20119728782016 @default.
- W2011972878 countsByYear W20119728782017 @default.
- W2011972878 countsByYear W20119728782018 @default.
- W2011972878 countsByYear W20119728782020 @default.
- W2011972878 countsByYear W20119728782021 @default.
- W2011972878 countsByYear W20119728782023 @default.
- W2011972878 crossrefType "journal-article" @default.
- W2011972878 hasAuthorship W2011972878A5015543871 @default.
- W2011972878 hasAuthorship W2011972878A5021116601 @default.
- W2011972878 hasAuthorship W2011972878A5064630364 @default.
- W2011972878 hasAuthorship W2011972878A5082168482 @default.
- W2011972878 hasConcept C100460472 @default.
- W2011972878 hasConcept C160671074 @default.
- W2011972878 hasConcept C162743726 @default.
- W2011972878 hasConcept C171250308 @default.
- W2011972878 hasConcept C191897082 @default.
- W2011972878 hasConcept C192562407 @default.
- W2011972878 hasConcept C194760766 @default.
- W2011972878 hasConcept C2777047311 @default.
- W2011972878 hasConcept C2777431650 @default.
- W2011972878 hasConcept C2779105228 @default.
- W2011972878 hasConcept C2779227376 @default.
- W2011972878 hasConcept C2779851234 @default.
- W2011972878 hasConcept C2910700394 @default.
- W2011972878 hasConcept C33574316 @default.
- W2011972878 hasConcept C513153333 @default.
- W2011972878 hasConcept C535196362 @default.
- W2011972878 hasConcept C544956773 @default.
- W2011972878 hasConcept C87359718 @default.
- W2011972878 hasConceptScore W2011972878C100460472 @default.
- W2011972878 hasConceptScore W2011972878C160671074 @default.
- W2011972878 hasConceptScore W2011972878C162743726 @default.
- W2011972878 hasConceptScore W2011972878C171250308 @default.
- W2011972878 hasConceptScore W2011972878C191897082 @default.
- W2011972878 hasConceptScore W2011972878C192562407 @default.
- W2011972878 hasConceptScore W2011972878C194760766 @default.
- W2011972878 hasConceptScore W2011972878C2777047311 @default.
- W2011972878 hasConceptScore W2011972878C2777431650 @default.
- W2011972878 hasConceptScore W2011972878C2779105228 @default.
- W2011972878 hasConceptScore W2011972878C2779227376 @default.
- W2011972878 hasConceptScore W2011972878C2779851234 @default.
- W2011972878 hasConceptScore W2011972878C2910700394 @default.
- W2011972878 hasConceptScore W2011972878C33574316 @default.
- W2011972878 hasConceptScore W2011972878C513153333 @default.
- W2011972878 hasConceptScore W2011972878C535196362 @default.
- W2011972878 hasConceptScore W2011972878C544956773 @default.
- W2011972878 hasConceptScore W2011972878C87359718 @default.
- W2011972878 hasIssue "1-3" @default.
- W2011972878 hasLocation W20119728781 @default.
- W2011972878 hasOpenAccess W2011972878 @default.
- W2011972878 hasPrimaryLocation W20119728781 @default.
- W2011972878 hasRelatedWork W1941413810 @default.
- W2011972878 hasRelatedWork W1993168058 @default.
- W2011972878 hasRelatedWork W2046572941 @default.
- W2011972878 hasRelatedWork W2059367690 @default.
- W2011972878 hasRelatedWork W2076502257 @default.
- W2011972878 hasRelatedWork W2088027387 @default.
- W2011972878 hasRelatedWork W2471090732 @default.
- W2011972878 hasRelatedWork W2599441348 @default.
- W2011972878 hasRelatedWork W4302375762 @default.
- W2011972878 hasRelatedWork W4323906829 @default.
- W2011972878 hasVolume "23" @default.
- W2011972878 isParatext "false" @default.
- W2011972878 isRetracted "false" @default.
- W2011972878 magId "2011972878" @default.
- W2011972878 workType "article" @default.