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- W2011974939 abstract "Abstract Treatment using water dissolved highly ozone (ozonated-water) was investigated to eliminate organic contaminations from the surface of silicon wafer. In order to enhance a concentration of ozone in ozonated-water, impurity soluble in ultra pure water, especially CO 2 , was found to be significant. It is presumed that such impurity plays the role of inhibitor to suppress decomposition of O 3 . The ozonated-water dissolved ozone of 100 mg/l and above showed excellent properties to eliminate resist as typical model of organic contaminants. It was found that the elimination rate of resist depends not on coexistence of H 2 O 2 but on temperature of ozonated-water." @default.
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- W2011974939 date "2007-11-01" @default.
- W2011974939 modified "2023-09-25" @default.
- W2011974939 title "Elimination of organic contaminants from silicon wafers using high concentration ozonated-water" @default.
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- W2011974939 doi "https://doi.org/10.1016/j.electacta.2007.04.059" @default.
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