Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012009525> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2012009525 abstract "In this work, an approach has been adopted to explore plasma properties by combining an in situ optical emission technique with a contact angle measurement. Hydrogen plasma was generated with a radio-frequency power source. The plasma parameters such as number densities and temperatures were derived from the optical emission spectroscopic data. Small silicon chips were placed at various positions inside a discharge tube as probes for the plasma conditions. The hydrogen-plasma-treated silicon chip surfaces were characterized with the contact angle measurement method. The change of wettability on the silicon surface was observed with various plasma treatment times. The spectroscopic information about the plasma is correlated with the results of the surface characterization. It is found that the rate of the increasing hydrophilicity is sensitive to the amount of helium added and the location in the discharge tube. A simple model describing the relation between the surface coverage area of water droplet and the variation of contact angle has been established. We have proposed plasma excitation and reaction mechanisms for the observed correlation between plasma temperatures and the wettability of the silicon surface. It shows that small silicon chips can serve as “litmus tests” for the plasma conditions without introducing too much perturbation." @default.
- W2012009525 created "2016-06-24" @default.
- W2012009525 creator A5006542034 @default.
- W2012009525 creator A5084294429 @default.
- W2012009525 date "2005-11-15" @default.
- W2012009525 modified "2023-10-16" @default.
- W2012009525 title "Diagnostics of hydrogen plasma with in situ optical emission and silicon probes" @default.
- W2012009525 cites W1964272543 @default.
- W2012009525 cites W1992550350 @default.
- W2012009525 cites W2001135580 @default.
- W2012009525 cites W2005289471 @default.
- W2012009525 cites W2007097955 @default.
- W2012009525 cites W2016154280 @default.
- W2012009525 cites W2016846003 @default.
- W2012009525 cites W2022581127 @default.
- W2012009525 cites W2029239099 @default.
- W2012009525 cites W2039871495 @default.
- W2012009525 cites W2053957422 @default.
- W2012009525 cites W2063651915 @default.
- W2012009525 cites W2067121049 @default.
- W2012009525 cites W2073225195 @default.
- W2012009525 cites W2073834756 @default.
- W2012009525 cites W2075730634 @default.
- W2012009525 cites W2075740382 @default.
- W2012009525 cites W2081115235 @default.
- W2012009525 cites W2082858631 @default.
- W2012009525 cites W2084807890 @default.
- W2012009525 cites W2090614586 @default.
- W2012009525 cites W2098577826 @default.
- W2012009525 cites W2164314770 @default.
- W2012009525 cites W2330425744 @default.
- W2012009525 doi "https://doi.org/10.1063/1.2132517" @default.
- W2012009525 hasPublicationYear "2005" @default.
- W2012009525 type Work @default.
- W2012009525 sameAs 2012009525 @default.
- W2012009525 citedByCount "5" @default.
- W2012009525 countsByYear W20120095252014 @default.
- W2012009525 countsByYear W20120095252015 @default.
- W2012009525 countsByYear W20120095252016 @default.
- W2012009525 crossrefType "journal-article" @default.
- W2012009525 hasAuthorship W2012009525A5006542034 @default.
- W2012009525 hasAuthorship W2012009525A5084294429 @default.
- W2012009525 hasConcept C113196181 @default.
- W2012009525 hasConcept C121332964 @default.
- W2012009525 hasConcept C134514944 @default.
- W2012009525 hasConcept C159985019 @default.
- W2012009525 hasConcept C178790620 @default.
- W2012009525 hasConcept C184779094 @default.
- W2012009525 hasConcept C185592680 @default.
- W2012009525 hasConcept C192039680 @default.
- W2012009525 hasConcept C192562407 @default.
- W2012009525 hasConcept C43503373 @default.
- W2012009525 hasConcept C43617362 @default.
- W2012009525 hasConcept C49040817 @default.
- W2012009525 hasConcept C512968161 @default.
- W2012009525 hasConcept C544956773 @default.
- W2012009525 hasConcept C60581705 @default.
- W2012009525 hasConcept C62520636 @default.
- W2012009525 hasConcept C6556556 @default.
- W2012009525 hasConcept C82706917 @default.
- W2012009525 hasConceptScore W2012009525C113196181 @default.
- W2012009525 hasConceptScore W2012009525C121332964 @default.
- W2012009525 hasConceptScore W2012009525C134514944 @default.
- W2012009525 hasConceptScore W2012009525C159985019 @default.
- W2012009525 hasConceptScore W2012009525C178790620 @default.
- W2012009525 hasConceptScore W2012009525C184779094 @default.
- W2012009525 hasConceptScore W2012009525C185592680 @default.
- W2012009525 hasConceptScore W2012009525C192039680 @default.
- W2012009525 hasConceptScore W2012009525C192562407 @default.
- W2012009525 hasConceptScore W2012009525C43503373 @default.
- W2012009525 hasConceptScore W2012009525C43617362 @default.
- W2012009525 hasConceptScore W2012009525C49040817 @default.
- W2012009525 hasConceptScore W2012009525C512968161 @default.
- W2012009525 hasConceptScore W2012009525C544956773 @default.
- W2012009525 hasConceptScore W2012009525C60581705 @default.
- W2012009525 hasConceptScore W2012009525C62520636 @default.
- W2012009525 hasConceptScore W2012009525C6556556 @default.
- W2012009525 hasConceptScore W2012009525C82706917 @default.
- W2012009525 hasIssue "10" @default.
- W2012009525 hasLocation W20120095251 @default.
- W2012009525 hasOpenAccess W2012009525 @default.
- W2012009525 hasPrimaryLocation W20120095251 @default.
- W2012009525 hasRelatedWork W1676253050 @default.
- W2012009525 hasRelatedWork W2020035984 @default.
- W2012009525 hasRelatedWork W2069397480 @default.
- W2012009525 hasRelatedWork W2078148991 @default.
- W2012009525 hasRelatedWork W2250913973 @default.
- W2012009525 hasRelatedWork W2301390464 @default.
- W2012009525 hasRelatedWork W2531255960 @default.
- W2012009525 hasRelatedWork W2900091209 @default.
- W2012009525 hasRelatedWork W2941809692 @default.
- W2012009525 hasRelatedWork W4367186977 @default.
- W2012009525 hasVolume "98" @default.
- W2012009525 isParatext "false" @default.
- W2012009525 isRetracted "false" @default.
- W2012009525 magId "2012009525" @default.
- W2012009525 workType "article" @default.