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- W2012023787 abstract "While the deceleration-versus-pressure characteristic of the spinning rotor gauge (SRG) shows excellent proportionality under molecular flow conditions, strong deviations built up at the viscous flow regime. By linearization of the SRG characteristic and on-line thermal correction of the gas parameters entering the SRG pressure evaluation procedure an accuracy of 5% has been achieved for a variety of common gases under viscous flow conditions. For the thermal correction the new system comprises an ohmic temperature sensor attached to the rotor chamber. The linear pressure range of the SRG now extends from 1 μPa up to 1 atm (11 decades). Furthermore, the system is well suited for determination of the gas viscosity and its thermal increment." @default.
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- W2012023787 date "1991-09-01" @default.
- W2012023787 modified "2023-09-24" @default.
- W2012023787 title "Linearization and temperature compensation up to one atmosphere for the spinning rotor gauge" @default.
- W2012023787 doi "https://doi.org/10.1116/1.577191" @default.
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