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- W2012042955 abstract "Advanced reticle specifications for critical dimension control (CD) and CD linearity of 150 nm generation devices requires significant improvements to the mask making process. ZEP 7000 is an e-beam resist that exhibits good contrast properties and acceptable dry etch resistance while maintaining superior lithographic quality. In this paper, an advanced process utilizing thin ZEP 7000 resist and ICP will be described. The combination of these two unit processes describes a factor space in mask making that is acceptable for the production of masks that meet the 150 nm ITRS roadmap requirements." @default.
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- W2012042955 date "2000-07-19" @default.
- W2012042955 modified "2023-09-23" @default.
- W2012042955 title "150-nm mask fabrication using thin ZEP 7000 resist, GHOST, and dry etch for the MEBES 5000 pattern generator" @default.
- W2012042955 doi "https://doi.org/10.1117/12.392061" @default.
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