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- W2012048287 abstract "A comparative investigation of flash lamp and laser doping of Si was carried out in order to study a possibility of pulsed solid-phase processing of large size wafers. Submicron boron- doped layers in Si were formed by either Xe flash lamp or CO<SUB>2</SUB> laser applications. Two types of surface dopant source were successfully used: pure boron and boron-containing emulsitone. SIMS, four-probe method, and Hall effect were used for sample characterization." @default.
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- W2012048287 date "1992-08-01" @default.
- W2012048287 modified "2023-10-17" @default.
- W2012048287 title "Solid-phase doping of silicon by flash lamp and laser irradiation" @default.
- W2012048287 doi "https://doi.org/10.1117/12.131062" @default.
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