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• W2012054516 abstract "In order to scan a surface with high-step micro-features non-destructively and accurately, a novel tapping-mode stylus fabricated with a strip of thin piezoelectric polyvinylidene fluoride (PVDF) film is proposed. Besides the flexible piezoelectric PVDF film, the stylus also consists of a piezo-actuator, which actuates the PVDF strip to vibrate near its resonant frequency, and a tungsten probe which adheres under the PVDF film. The vibrating PVDF film acts as both the cantilever and the vibrating deflection detector as used in a tapping-mode atomic force microscope. Operated with an X–Y scanner, the tapping stylus can scan the surface like a tapping-mode scanning probe microscope." @default.
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• W2012054516 date "2004-02-09" @default.
• W2012054516 modified "2023-09-27" @default.
• W2012054516 title "A novel tapping-mode stylus with a polyvinylidene fluoride unimorph sensor" @default.
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• W2012054516 doi "https://doi.org/10.1088/0957-0233/15/3/004" @default.
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