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- W2012077237 abstract "We describe a null-field ellipsometric imaging system (NEIS) that provides for the real-time imaging of carbon deposition profiles on extreme-ultraviolet (EUV) optics in a vacuum system. NEIS has been demonstrated at NIST on a small chamber that is used for EUV optics lifetime testing. The system provides images of carbon deposition spots with sub-nanometer resolution thickness measurements that maintain good agreement with those from ex-situ spectral ellipsometry (SE) and x-ray photoelectron spectroscopy (XPS). The system will be implemented on several synchrotron beamlines for real-time monitoring of carbon film growth on optics during EUV irradiation." @default.
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- W2012077237 date "2010-03-11" @default.
- W2012077237 modified "2023-09-24" @default.
- W2012077237 title "A simple null-field ellipsometric imaging system (NEIS) for in-situ monitoring of EUV-induced deposition on EUV optics" @default.
- W2012077237 cites W2034010375 @default.
- W2012077237 doi "https://doi.org/10.1117/12.855967" @default.
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