Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012084735> ?p ?o ?g. }
- W2012084735 endingPage "2007" @default.
- W2012084735 startingPage "2003" @default.
- W2012084735 abstract "Varied SiNx films have been deposited by low pressure chemical vapor deposition from silane SiH4 and ammonia NH3 and the influences of the deposition parameters (temperature, total pressure and NH3/SiH4 gaseous ratio) on the film deposition rate, refractive index (assessed at a 830 nm wavelength), stoichiometry and thermomechanical stress are investigated and correlated. Low stress (≈600 MPa) Si3N4 films are obtained for the highest deposition temperature and the lowest total pressure but the gaseous ratio is shown to be the dominant parameter. According to the SiNx stoichiometry, silicon-rich silicon nitride and nitrogen-doped silicon (called NIDOS) depositions are obtained and compressive to tensile stresses are reported. A maximum in compressive stress is put into evidence for N/Si ratio roughly equal to 0.7 and is related to the cumulated effects of silicon nitridation and crystallization, characterizing the transition between nitrogen-doped silicon and silicon-rich silicon nitride. Finally, by considering stress, deposition rate, nonuniformity along the load and resistance to alkaline solutions, optimal (silicon-rich) silicon nitride deposition conditions are proposed for microelectromechanical applications." @default.
- W2012084735 created "2016-06-24" @default.
- W2012084735 creator A5014113718 @default.
- W2012084735 creator A5028020968 @default.
- W2012084735 creator A5065536664 @default.
- W2012084735 creator A5090105044 @default.
- W2012084735 date "1998-07-01" @default.
- W2012084735 modified "2023-10-18" @default.
- W2012084735 title "Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia" @default.
- W2012084735 cites W1958754721 @default.
- W2012084735 cites W1965377417 @default.
- W2012084735 cites W1986343393 @default.
- W2012084735 cites W1990244340 @default.
- W2012084735 cites W1991540986 @default.
- W2012084735 cites W1992018767 @default.
- W2012084735 cites W1993888007 @default.
- W2012084735 cites W1997441138 @default.
- W2012084735 cites W1997890780 @default.
- W2012084735 cites W2010667775 @default.
- W2012084735 cites W2012899125 @default.
- W2012084735 cites W2018901486 @default.
- W2012084735 cites W2020984192 @default.
- W2012084735 cites W2039657534 @default.
- W2012084735 cites W2043319682 @default.
- W2012084735 cites W2053644273 @default.
- W2012084735 cites W2079565232 @default.
- W2012084735 cites W2092139036 @default.
- W2012084735 cites W2128552649 @default.
- W2012084735 cites W2319012273 @default.
- W2012084735 doi "https://doi.org/10.1116/1.581302" @default.
- W2012084735 hasPublicationYear "1998" @default.
- W2012084735 type Work @default.
- W2012084735 sameAs 2012084735 @default.
- W2012084735 citedByCount "145" @default.
- W2012084735 countsByYear W20120847352012 @default.
- W2012084735 countsByYear W20120847352013 @default.
- W2012084735 countsByYear W20120847352014 @default.
- W2012084735 countsByYear W20120847352015 @default.
- W2012084735 countsByYear W20120847352016 @default.
- W2012084735 countsByYear W20120847352017 @default.
- W2012084735 countsByYear W20120847352018 @default.
- W2012084735 countsByYear W20120847352019 @default.
- W2012084735 countsByYear W20120847352020 @default.
- W2012084735 countsByYear W20120847352021 @default.
- W2012084735 countsByYear W20120847352022 @default.
- W2012084735 countsByYear W20120847352023 @default.
- W2012084735 crossrefType "journal-article" @default.
- W2012084735 hasAuthorship W2012084735A5014113718 @default.
- W2012084735 hasAuthorship W2012084735A5028020968 @default.
- W2012084735 hasAuthorship W2012084735A5065536664 @default.
- W2012084735 hasAuthorship W2012084735A5090105044 @default.
- W2012084735 hasConcept C111368507 @default.
- W2012084735 hasConcept C113196181 @default.
- W2012084735 hasConcept C127313418 @default.
- W2012084735 hasConcept C144082473 @default.
- W2012084735 hasConcept C151730666 @default.
- W2012084735 hasConcept C159985019 @default.
- W2012084735 hasConcept C171250308 @default.
- W2012084735 hasConcept C178790620 @default.
- W2012084735 hasConcept C185592680 @default.
- W2012084735 hasConcept C191897082 @default.
- W2012084735 hasConcept C192562407 @default.
- W2012084735 hasConcept C200239111 @default.
- W2012084735 hasConcept C2777431650 @default.
- W2012084735 hasConcept C2778024649 @default.
- W2012084735 hasConcept C2816523 @default.
- W2012084735 hasConcept C37292000 @default.
- W2012084735 hasConcept C38347018 @default.
- W2012084735 hasConcept C544956773 @default.
- W2012084735 hasConcept C57410435 @default.
- W2012084735 hasConcept C64297162 @default.
- W2012084735 hasConcept C86803240 @default.
- W2012084735 hasConceptScore W2012084735C111368507 @default.
- W2012084735 hasConceptScore W2012084735C113196181 @default.
- W2012084735 hasConceptScore W2012084735C127313418 @default.
- W2012084735 hasConceptScore W2012084735C144082473 @default.
- W2012084735 hasConceptScore W2012084735C151730666 @default.
- W2012084735 hasConceptScore W2012084735C159985019 @default.
- W2012084735 hasConceptScore W2012084735C171250308 @default.
- W2012084735 hasConceptScore W2012084735C178790620 @default.
- W2012084735 hasConceptScore W2012084735C185592680 @default.
- W2012084735 hasConceptScore W2012084735C191897082 @default.
- W2012084735 hasConceptScore W2012084735C192562407 @default.
- W2012084735 hasConceptScore W2012084735C200239111 @default.
- W2012084735 hasConceptScore W2012084735C2777431650 @default.
- W2012084735 hasConceptScore W2012084735C2778024649 @default.
- W2012084735 hasConceptScore W2012084735C2816523 @default.
- W2012084735 hasConceptScore W2012084735C37292000 @default.
- W2012084735 hasConceptScore W2012084735C38347018 @default.
- W2012084735 hasConceptScore W2012084735C544956773 @default.
- W2012084735 hasConceptScore W2012084735C57410435 @default.
- W2012084735 hasConceptScore W2012084735C64297162 @default.
- W2012084735 hasConceptScore W2012084735C86803240 @default.
- W2012084735 hasIssue "4" @default.
- W2012084735 hasLocation W20120847351 @default.
- W2012084735 hasOpenAccess W2012084735 @default.
- W2012084735 hasPrimaryLocation W20120847351 @default.
- W2012084735 hasRelatedWork W2003186231 @default.