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- W2012087462 abstract "Abstract Anodic bonding of single crystal silicon wafer with glass and subsequent splitting of the silicon wafer is done by ion-cut technique that involves proton bombardment at desired energies at a dose level > 5 × 10 16 cm − 2 and then subjected to the bond pair for heat treatment at ∼ 550 °C. Details of the bonding and splitting processes have been discussed in the present study. The high resolution X-ray diffractometry studies have been performed and found that transferred single crystalline thin silicon layer has less crystalline perfection than the original wafer. It suggests that some improvement is still required in the ion-cut technique to improve the crystalline quality of the transferred layer before going to be used for the device applications." @default.
- W2012087462 created "2016-06-24" @default.
- W2012087462 creator A5006534123 @default.
- W2012087462 creator A5006962455 @default.
- W2012087462 creator A5010377131 @default.
- W2012087462 creator A5015818852 @default.
- W2012087462 date "2007-06-01" @default.
- W2012087462 modified "2023-10-16" @default.
- W2012087462 title "Anodic bonding of silicon onto glass by ion-cut technique and their characterization using high resolution X-ray diffraction studies" @default.
- W2012087462 cites W2036061165 @default.
- W2012087462 cites W2047407234 @default.
- W2012087462 cites W2063492344 @default.
- W2012087462 cites W2083588888 @default.
- W2012087462 cites W2114042715 @default.
- W2012087462 cites W2118059050 @default.
- W2012087462 cites W2182500102 @default.
- W2012087462 cites W2521452640 @default.
- W2012087462 doi "https://doi.org/10.1016/j.matlet.2006.10.076" @default.
- W2012087462 hasPublicationYear "2007" @default.
- W2012087462 type Work @default.
- W2012087462 sameAs 2012087462 @default.
- W2012087462 citedByCount "1" @default.
- W2012087462 countsByYear W20120874622017 @default.
- W2012087462 crossrefType "journal-article" @default.
- W2012087462 hasAuthorship W2012087462A5006534123 @default.
- W2012087462 hasAuthorship W2012087462A5006962455 @default.
- W2012087462 hasAuthorship W2012087462A5010377131 @default.
- W2012087462 hasAuthorship W2012087462A5015818852 @default.
- W2012087462 hasConcept C120665830 @default.
- W2012087462 hasConcept C121332964 @default.
- W2012087462 hasConcept C145148216 @default.
- W2012087462 hasConcept C147789679 @default.
- W2012087462 hasConcept C160671074 @default.
- W2012087462 hasConcept C171250308 @default.
- W2012087462 hasConcept C17525397 @default.
- W2012087462 hasConcept C178790620 @default.
- W2012087462 hasConcept C185592680 @default.
- W2012087462 hasConcept C192562407 @default.
- W2012087462 hasConcept C199360897 @default.
- W2012087462 hasConcept C201414436 @default.
- W2012087462 hasConcept C207114421 @default.
- W2012087462 hasConcept C2779133538 @default.
- W2012087462 hasConcept C2779227376 @default.
- W2012087462 hasConcept C2779667780 @default.
- W2012087462 hasConcept C2780841128 @default.
- W2012087462 hasConcept C2781285689 @default.
- W2012087462 hasConcept C41008148 @default.
- W2012087462 hasConcept C49040817 @default.
- W2012087462 hasConcept C544956773 @default.
- W2012087462 hasConcept C73922627 @default.
- W2012087462 hasConcept C8010536 @default.
- W2012087462 hasConcept C89395315 @default.
- W2012087462 hasConceptScore W2012087462C120665830 @default.
- W2012087462 hasConceptScore W2012087462C121332964 @default.
- W2012087462 hasConceptScore W2012087462C145148216 @default.
- W2012087462 hasConceptScore W2012087462C147789679 @default.
- W2012087462 hasConceptScore W2012087462C160671074 @default.
- W2012087462 hasConceptScore W2012087462C171250308 @default.
- W2012087462 hasConceptScore W2012087462C17525397 @default.
- W2012087462 hasConceptScore W2012087462C178790620 @default.
- W2012087462 hasConceptScore W2012087462C185592680 @default.
- W2012087462 hasConceptScore W2012087462C192562407 @default.
- W2012087462 hasConceptScore W2012087462C199360897 @default.
- W2012087462 hasConceptScore W2012087462C201414436 @default.
- W2012087462 hasConceptScore W2012087462C207114421 @default.
- W2012087462 hasConceptScore W2012087462C2779133538 @default.
- W2012087462 hasConceptScore W2012087462C2779227376 @default.
- W2012087462 hasConceptScore W2012087462C2779667780 @default.
- W2012087462 hasConceptScore W2012087462C2780841128 @default.
- W2012087462 hasConceptScore W2012087462C2781285689 @default.
- W2012087462 hasConceptScore W2012087462C41008148 @default.
- W2012087462 hasConceptScore W2012087462C49040817 @default.
- W2012087462 hasConceptScore W2012087462C544956773 @default.
- W2012087462 hasConceptScore W2012087462C73922627 @default.
- W2012087462 hasConceptScore W2012087462C8010536 @default.
- W2012087462 hasConceptScore W2012087462C89395315 @default.
- W2012087462 hasLocation W20120874621 @default.
- W2012087462 hasOpenAccess W2012087462 @default.
- W2012087462 hasPrimaryLocation W20120874621 @default.
- W2012087462 hasRelatedWork W1538527935 @default.
- W2012087462 hasRelatedWork W1583593715 @default.
- W2012087462 hasRelatedWork W2003685085 @default.
- W2012087462 hasRelatedWork W2017750123 @default.
- W2012087462 hasRelatedWork W2046370421 @default.
- W2012087462 hasRelatedWork W2083944156 @default.
- W2012087462 hasRelatedWork W2085757918 @default.
- W2012087462 hasRelatedWork W2089394422 @default.
- W2012087462 hasRelatedWork W2547311444 @default.
- W2012087462 hasRelatedWork W4247031002 @default.
- W2012087462 isParatext "false" @default.
- W2012087462 isRetracted "false" @default.
- W2012087462 magId "2012087462" @default.
- W2012087462 workType "article" @default.