Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012087598> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2012087598 endingPage "192" @default.
- W2012087598 startingPage "190" @default.
- W2012087598 abstract "An approach for integrating 3.3 V and 5.0 V transistors with two different gate oxide thickness layers, which eliminates the compromise between the transistor performance and reliability of the gate oxide layers, is described. The approach is robust, since gate oxide layers do not come in contact with photoresists, and relatively cost-effective in that it adds only two coarse masking steps. This approach has been demonstrated by integrating 16.5-nm 5.0 V and 10-nm 3.3 V gate oxide layers in a 0.6-/spl mu/m mixed signal CMOS process, and demonstrating good 3.3 V and 5.0 V transistor characteristics.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2012087598 created "2016-06-24" @default.
- W2012087598 creator A5013864300 @default.
- W2012087598 date "1995-01-01" @default.
- W2012087598 modified "2023-10-16" @default.
- W2012087598 title "Integration of two different gate oxide thicknesses in a 0.6-μm dual voltage mixed signal CMOS process" @default.
- W2012087598 cites W2103080810 @default.
- W2012087598 cites W2109933221 @default.
- W2012087598 cites W2111456142 @default.
- W2012087598 cites W2160735262 @default.
- W2012087598 cites W2163250488 @default.
- W2012087598 doi "https://doi.org/10.1109/16.370017" @default.
- W2012087598 hasPublicationYear "1995" @default.
- W2012087598 type Work @default.
- W2012087598 sameAs 2012087598 @default.
- W2012087598 citedByCount "6" @default.
- W2012087598 countsByYear W20120875982012 @default.
- W2012087598 countsByYear W20120875982014 @default.
- W2012087598 crossrefType "journal-article" @default.
- W2012087598 hasAuthorship W2012087598A5013864300 @default.
- W2012087598 hasConcept C119599485 @default.
- W2012087598 hasConcept C121332964 @default.
- W2012087598 hasConcept C127413603 @default.
- W2012087598 hasConcept C142362112 @default.
- W2012087598 hasConcept C153349607 @default.
- W2012087598 hasConcept C163258240 @default.
- W2012087598 hasConcept C165801399 @default.
- W2012087598 hasConcept C172385210 @default.
- W2012087598 hasConcept C191897082 @default.
- W2012087598 hasConcept C192562407 @default.
- W2012087598 hasConcept C199360897 @default.
- W2012087598 hasConcept C2361726 @default.
- W2012087598 hasConcept C24326235 @default.
- W2012087598 hasConcept C2777402240 @default.
- W2012087598 hasConcept C2779843651 @default.
- W2012087598 hasConcept C2779851234 @default.
- W2012087598 hasConcept C41008148 @default.
- W2012087598 hasConcept C43214815 @default.
- W2012087598 hasConcept C46362747 @default.
- W2012087598 hasConcept C49040817 @default.
- W2012087598 hasConcept C62520636 @default.
- W2012087598 hasConceptScore W2012087598C119599485 @default.
- W2012087598 hasConceptScore W2012087598C121332964 @default.
- W2012087598 hasConceptScore W2012087598C127413603 @default.
- W2012087598 hasConceptScore W2012087598C142362112 @default.
- W2012087598 hasConceptScore W2012087598C153349607 @default.
- W2012087598 hasConceptScore W2012087598C163258240 @default.
- W2012087598 hasConceptScore W2012087598C165801399 @default.
- W2012087598 hasConceptScore W2012087598C172385210 @default.
- W2012087598 hasConceptScore W2012087598C191897082 @default.
- W2012087598 hasConceptScore W2012087598C192562407 @default.
- W2012087598 hasConceptScore W2012087598C199360897 @default.
- W2012087598 hasConceptScore W2012087598C2361726 @default.
- W2012087598 hasConceptScore W2012087598C24326235 @default.
- W2012087598 hasConceptScore W2012087598C2777402240 @default.
- W2012087598 hasConceptScore W2012087598C2779843651 @default.
- W2012087598 hasConceptScore W2012087598C2779851234 @default.
- W2012087598 hasConceptScore W2012087598C41008148 @default.
- W2012087598 hasConceptScore W2012087598C43214815 @default.
- W2012087598 hasConceptScore W2012087598C46362747 @default.
- W2012087598 hasConceptScore W2012087598C49040817 @default.
- W2012087598 hasConceptScore W2012087598C62520636 @default.
- W2012087598 hasIssue "1" @default.
- W2012087598 hasLocation W20120875981 @default.
- W2012087598 hasOpenAccess W2012087598 @default.
- W2012087598 hasPrimaryLocation W20120875981 @default.
- W2012087598 hasRelatedWork W1561253851 @default.
- W2012087598 hasRelatedWork W1563540659 @default.
- W2012087598 hasRelatedWork W1749848917 @default.
- W2012087598 hasRelatedWork W2076002219 @default.
- W2012087598 hasRelatedWork W2131466212 @default.
- W2012087598 hasRelatedWork W2139774918 @default.
- W2012087598 hasRelatedWork W2899084033 @default.
- W2012087598 hasRelatedWork W4293114473 @default.
- W2012087598 hasRelatedWork W2132665626 @default.
- W2012087598 hasRelatedWork W2490773832 @default.
- W2012087598 hasVolume "42" @default.
- W2012087598 isParatext "false" @default.
- W2012087598 isRetracted "false" @default.
- W2012087598 magId "2012087598" @default.
- W2012087598 workType "article" @default.