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- W2012092956 abstract "In a joint-development, Rohwedder and Osmic have designed and built a low-defect dual-ion beam reactive-sputtering tool. The tool has been specifically targeted for developing low-defect lithography mask photoblank coatings intended as DUV absorbers and phase-shifting films. The Osmic/Rohwedder collaboration will continue into NGL -- the present tool also serves as an R&D platform for EUVL mask blanks. The deposition tool and robotic substrate handler have been integrated and delivered to Osmic in the 2nd quarter of 2003. In this paper, we present initial capability for production of thin-film lithography coatings, including spectrophotometric performance, defect levels and film uniformity. Future reports will share results from more in-depth process development and optimization." @default.
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- W2012092956 date "2003-08-26" @default.
- W2012092956 modified "2023-09-23" @default.
- W2012092956 title "Initial capability of new photomask-blank deposition tool" @default.
- W2012092956 doi "https://doi.org/10.1117/12.504179" @default.
- W2012092956 hasPublicationYear "2003" @default.
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