Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012100581> ?p ?o ?g. }
- W2012100581 endingPage "2068" @default.
- W2012100581 startingPage "2063" @default.
- W2012100581 abstract "The Ti-mask selective-area growth (SAG) of GaN nanocolumns was performed at the growth temperature of 900 °C, while decreasing the supplied nitrogen flow rate (QN2) from 3.5 to 0.5 sccm. Highly uniform arrays of GaN nanocolumns were demonstrated. At low QN2, both the desorption and diffusion of Ga from/on the nitrided Ti mask were accelerated, which sufficiently suppressed the crystal nucleation on the Ti-mask surface, and hence the SAG of the GaN nanocolumns was achieved even when the spacing between the nanocolumns was several hundred nm. The enhancement of Ga desorption with decreasing QN2 brought about a reduction in the growth rate of GaN nanocolumns from 1.05 to 0.15 μm/h. The lateral growth rate of the GaN nanocolumns rapidly increased above the critical QN2 value of 1.5 sccm and became 45 nm/h at QN2 of 3.5 sccm. For low QN2 values less than 1.5 sccm, the lateral growth rate became sufficiently low, approximately 8 nm/h; this contributes to well-controlled SAG of GaN, where the underlying nanomask patterns are well traced." @default.
- W2012100581 created "2016-06-24" @default.
- W2012100581 creator A5006967168 @default.
- W2012100581 creator A5034471162 @default.
- W2012100581 creator A5074125260 @default.
- W2012100581 date "2009-03-01" @default.
- W2012100581 modified "2023-09-29" @default.
- W2012100581 title "Improved Ti-mask selective-area growth (SAG) by rf-plasma-assisted molecular beam epitaxy demonstrating extremely uniform GaN nanocolumn arrays" @default.
- W2012100581 cites W1966138258 @default.
- W2012100581 cites W1971954376 @default.
- W2012100581 cites W1977252905 @default.
- W2012100581 cites W1977989545 @default.
- W2012100581 cites W1998171057 @default.
- W2012100581 cites W2007766109 @default.
- W2012100581 cites W2015407301 @default.
- W2012100581 cites W2016466754 @default.
- W2012100581 cites W2016890249 @default.
- W2012100581 cites W2019573455 @default.
- W2012100581 cites W2040683383 @default.
- W2012100581 cites W2052376573 @default.
- W2012100581 cites W2059914671 @default.
- W2012100581 cites W2060155820 @default.
- W2012100581 cites W2060343123 @default.
- W2012100581 cites W2086948262 @default.
- W2012100581 cites W2091834878 @default.
- W2012100581 cites W2117388774 @default.
- W2012100581 cites W2123935159 @default.
- W2012100581 cites W2333652646 @default.
- W2012100581 doi "https://doi.org/10.1016/j.jcrysgro.2008.11.056" @default.
- W2012100581 hasPublicationYear "2009" @default.
- W2012100581 type Work @default.
- W2012100581 sameAs 2012100581 @default.
- W2012100581 citedByCount "242" @default.
- W2012100581 countsByYear W20121005812012 @default.
- W2012100581 countsByYear W20121005812013 @default.
- W2012100581 countsByYear W20121005812014 @default.
- W2012100581 countsByYear W20121005812015 @default.
- W2012100581 countsByYear W20121005812016 @default.
- W2012100581 countsByYear W20121005812017 @default.
- W2012100581 countsByYear W20121005812018 @default.
- W2012100581 countsByYear W20121005812019 @default.
- W2012100581 countsByYear W20121005812020 @default.
- W2012100581 countsByYear W20121005812021 @default.
- W2012100581 countsByYear W20121005812022 @default.
- W2012100581 countsByYear W20121005812023 @default.
- W2012100581 crossrefType "journal-article" @default.
- W2012100581 hasAuthorship W2012100581A5006967168 @default.
- W2012100581 hasAuthorship W2012100581A5034471162 @default.
- W2012100581 hasAuthorship W2012100581A5074125260 @default.
- W2012100581 hasConcept C110738630 @default.
- W2012100581 hasConcept C113196181 @default.
- W2012100581 hasConcept C121332964 @default.
- W2012100581 hasConcept C150394285 @default.
- W2012100581 hasConcept C162711632 @default.
- W2012100581 hasConcept C171250308 @default.
- W2012100581 hasConcept C172120300 @default.
- W2012100581 hasConcept C178790620 @default.
- W2012100581 hasConcept C185592680 @default.
- W2012100581 hasConcept C192562407 @default.
- W2012100581 hasConcept C2524010 @default.
- W2012100581 hasConcept C2778312390 @default.
- W2012100581 hasConcept C2778871202 @default.
- W2012100581 hasConcept C2779227376 @default.
- W2012100581 hasConcept C33923547 @default.
- W2012100581 hasConcept C3792809 @default.
- W2012100581 hasConcept C43617362 @default.
- W2012100581 hasConcept C49040817 @default.
- W2012100581 hasConcept C61048295 @default.
- W2012100581 hasConcept C62520636 @default.
- W2012100581 hasConceptScore W2012100581C110738630 @default.
- W2012100581 hasConceptScore W2012100581C113196181 @default.
- W2012100581 hasConceptScore W2012100581C121332964 @default.
- W2012100581 hasConceptScore W2012100581C150394285 @default.
- W2012100581 hasConceptScore W2012100581C162711632 @default.
- W2012100581 hasConceptScore W2012100581C171250308 @default.
- W2012100581 hasConceptScore W2012100581C172120300 @default.
- W2012100581 hasConceptScore W2012100581C178790620 @default.
- W2012100581 hasConceptScore W2012100581C185592680 @default.
- W2012100581 hasConceptScore W2012100581C192562407 @default.
- W2012100581 hasConceptScore W2012100581C2524010 @default.
- W2012100581 hasConceptScore W2012100581C2778312390 @default.
- W2012100581 hasConceptScore W2012100581C2778871202 @default.
- W2012100581 hasConceptScore W2012100581C2779227376 @default.
- W2012100581 hasConceptScore W2012100581C33923547 @default.
- W2012100581 hasConceptScore W2012100581C3792809 @default.
- W2012100581 hasConceptScore W2012100581C43617362 @default.
- W2012100581 hasConceptScore W2012100581C49040817 @default.
- W2012100581 hasConceptScore W2012100581C61048295 @default.
- W2012100581 hasConceptScore W2012100581C62520636 @default.
- W2012100581 hasFunder F4320320912 @default.
- W2012100581 hasIssue "7" @default.
- W2012100581 hasLocation W20121005811 @default.
- W2012100581 hasOpenAccess W2012100581 @default.
- W2012100581 hasPrimaryLocation W20121005811 @default.
- W2012100581 hasRelatedWork W1978065589 @default.
- W2012100581 hasRelatedWork W1991396679 @default.
- W2012100581 hasRelatedWork W2037501457 @default.
- W2012100581 hasRelatedWork W2084838735 @default.