FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012102659> ?p ?o ?g. }

• W2012102659 abstract "Modem statistical modeling techniques are applied to the characterization and optimization of Rapid ThermalChemical Vapor Deposition. The problems of deposition during process ramps and thickness uniformitymodeling wafer are addressed. A two-phase fractional factorial experimental design is used to generate modelsfor the deposition rate, uniformity measures, and normalized time responses. A constrained algebraicoptimization algorithm is used to find the optimum settings for the reactor for the deposition of 2000A ofpolysilicon. The methods that are developed to handle these problems are shown in an application to thedeposition of polysilicon in a LeiskTM reactor." @default.
• W2012102659 created "2016-06-24" @default.
• W2012102659 creator A5025181840 @default.
• W2012102659 creator A5026580685 @default.
• W2012102659 creator A5036670654 @default.
• W2012102659 creator A5061088117 @default.
• W2012102659 date "1992-02-01" @default.
• W2012102659 modified "2023-09-23" @default.
• W2012102659 title "<title>Application of modern quality improvement techniques to rapid thermal processing</title>" @default.
• W2012102659 cites W1628842337 @default.
• W2012102659 cites W1651834614 @default.
• W2012102659 cites W192255670 @default.
• W2012102659 cites W1964105999 @default.
• W2012102659 cites W2044093053 @default.
• W2012102659 cites W2045622192 @default.
• W2012102659 cites W2069807590 @default.
• W2012102659 cites W2107196138 @default.
• W2012102659 cites W2146850252 @default.
• W2012102659 cites W220580398 @default.
• W2012102659 doi "https://doi.org/10.1117/12.56661" @default.
• W2012102659 hasPublicationYear "1992" @default.
• W2012102659 type Work @default.
• W2012102659 sameAs 2012102659 @default.
• W2012102659 citedByCount "2" @default.
• W2012102659 crossrefType "proceedings-article" @default.
• W2012102659 hasAuthorship W2012102659A5025181840 @default.
• W2012102659 hasAuthorship W2012102659A5026580685 @default.
• W2012102659 hasAuthorship W2012102659A5036670654 @default.
• W2012102659 hasAuthorship W2012102659A5061088117 @default.
• W2012102659 hasConcept C111919701 @default.
• W2012102659 hasConcept C11413529 @default.
• W2012102659 hasConcept C115952470 @default.
• W2012102659 hasConcept C116915560 @default.
• W2012102659 hasConcept C121332964 @default.
• W2012102659 hasConcept C127413603 @default.
• W2012102659 hasConcept C151730666 @default.
• W2012102659 hasConcept C160671074 @default.
• W2012102659 hasConcept C171250308 @default.
• W2012102659 hasConcept C192562407 @default.
• W2012102659 hasConcept C204530211 @default.
• W2012102659 hasConcept C21880701 @default.
• W2012102659 hasConcept C24326235 @default.
• W2012102659 hasConcept C2780841128 @default.
• W2012102659 hasConcept C2816523 @default.
• W2012102659 hasConcept C41008148 @default.
• W2012102659 hasConcept C42360764 @default.
• W2012102659 hasConcept C49040817 @default.
• W2012102659 hasConcept C57410435 @default.
• W2012102659 hasConcept C64297162 @default.
• W2012102659 hasConcept C72832162 @default.
• W2012102659 hasConcept C86803240 @default.
• W2012102659 hasConcept C97355855 @default.
• W2012102659 hasConcept C98045186 @default.
• W2012102659 hasConceptScore W2012102659C111919701 @default.
• W2012102659 hasConceptScore W2012102659C11413529 @default.
• W2012102659 hasConceptScore W2012102659C115952470 @default.
• W2012102659 hasConceptScore W2012102659C116915560 @default.
• W2012102659 hasConceptScore W2012102659C121332964 @default.
• W2012102659 hasConceptScore W2012102659C127413603 @default.
• W2012102659 hasConceptScore W2012102659C151730666 @default.
• W2012102659 hasConceptScore W2012102659C160671074 @default.
• W2012102659 hasConceptScore W2012102659C171250308 @default.
• W2012102659 hasConceptScore W2012102659C192562407 @default.
• W2012102659 hasConceptScore W2012102659C204530211 @default.
• W2012102659 hasConceptScore W2012102659C21880701 @default.
• W2012102659 hasConceptScore W2012102659C24326235 @default.
• W2012102659 hasConceptScore W2012102659C2780841128 @default.
• W2012102659 hasConceptScore W2012102659C2816523 @default.
• W2012102659 hasConceptScore W2012102659C41008148 @default.
• W2012102659 hasConceptScore W2012102659C42360764 @default.
• W2012102659 hasConceptScore W2012102659C49040817 @default.
• W2012102659 hasConceptScore W2012102659C57410435 @default.
• W2012102659 hasConceptScore W2012102659C64297162 @default.
• W2012102659 hasConceptScore W2012102659C72832162 @default.
• W2012102659 hasConceptScore W2012102659C86803240 @default.
• W2012102659 hasConceptScore W2012102659C97355855 @default.
• W2012102659 hasConceptScore W2012102659C98045186 @default.
• W2012102659 hasLocation W20121026591 @default.
• W2012102659 hasOpenAccess W2012102659 @default.
• W2012102659 hasPrimaryLocation W20121026591 @default.
• W2012102659 hasRelatedWork W1660401898 @default.
• W2012102659 hasRelatedWork W1816596316 @default.
• W2012102659 hasRelatedWork W1966563915 @default.
• W2012102659 hasRelatedWork W1975761466 @default.
• W2012102659 hasRelatedWork W2008886151 @default.
• W2012102659 hasRelatedWork W2027477937 @default.
• W2012102659 hasRelatedWork W2029336321 @default.
• W2012102659 hasRelatedWork W2036857315 @default.
• W2012102659 hasRelatedWork W2055167792 @default.
• W2012102659 hasRelatedWork W2097805011 @default.
• W2012102659 hasRelatedWork W2098420357 @default.
• W2012102659 hasRelatedWork W2105182979 @default.
• W2012102659 hasRelatedWork W2170306909 @default.
• W2012102659 hasRelatedWork W2280820944 @default.
• W2012102659 hasRelatedWork W2323751521 @default.
• W2012102659 hasRelatedWork W2323989953 @default.
• W2012102659 hasRelatedWork W2413767559 @default.
• W2012102659 hasRelatedWork W2497178220 @default.
• W2012102659 hasRelatedWork W2601910503 @default.
• W2012102659 hasRelatedWork W2914500460 @default.

• next