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- W2012111115 abstract "Measurements of voltage and current transients of a scaled model of an electrostatic microactuator have been performed. Experiments were made at a variety of values of the actuation source resistance, and the effects on the pull-in time and on the energy consumed in a switching event were analysed. It is concluded that the pull-in time remains sensibly constant until source resistance values are reached corresponding more closely to current-controlled than to voltage-controlled actuation. Furthermore, the energy consumed per switching event monotonically decreases with increasing source resistance. There is an optimum source resistance at which a minimum can be found for the product of pull-in time and energy in agreement with earlier theoretical predictions. The experimental results are quantitatively compared with Saber simulations incorporating an analog hardware description language model for the actuator." @default.
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- W2012111115 date "2000-05-01" @default.
- W2012111115 modified "2023-09-30" @default.
- W2012111115 title "Pull-in time–energy product of electrostatic actuators: comparison of experiments with simulation" @default.
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- W2012111115 doi "https://doi.org/10.1016/s0924-4247(99)00394-5" @default.
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