Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012124880> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2012124880 abstract "In addition to raising the numerical aperture of the imaging lens or reducing the exposing wavelength to improve resolution in optical lithography, a third direction is pursued, namely restoration of the potential resolution capability that is lost due to incorrect practice. Unlike the former two methods, a gain in depth of focus can accompany improvement in resolution. In this paper, elimination of vibration between the mask and the wafer, resist contrast improvement, and multilayer resist systems are cited as possible means for improvement. Simulation study are given on the effects of vibration and resist contrast improvement to quantitatively assess the improvements." @default.
- W2012124880 created "2016-06-24" @default.
- W2012124880 creator A5048964576 @default.
- W2012124880 date "1986-08-20" @default.
- W2012124880 modified "2023-09-25" @default.
- W2012124880 title "Where Is The Lost Resolution?" @default.
- W2012124880 doi "https://doi.org/10.1117/12.963701" @default.
- W2012124880 hasPublicationYear "1986" @default.
- W2012124880 type Work @default.
- W2012124880 sameAs 2012124880 @default.
- W2012124880 citedByCount "24" @default.
- W2012124880 countsByYear W20121248802013 @default.
- W2012124880 countsByYear W20121248802014 @default.
- W2012124880 countsByYear W20121248802015 @default.
- W2012124880 countsByYear W20121248802017 @default.
- W2012124880 countsByYear W20121248802018 @default.
- W2012124880 countsByYear W20121248802019 @default.
- W2012124880 countsByYear W20121248802020 @default.
- W2012124880 countsByYear W20121248802021 @default.
- W2012124880 countsByYear W20121248802022 @default.
- W2012124880 crossrefType "proceedings-article" @default.
- W2012124880 hasAuthorship W2012124880A5048964576 @default.
- W2012124880 hasConcept C120665830 @default.
- W2012124880 hasConcept C121332964 @default.
- W2012124880 hasConcept C138268822 @default.
- W2012124880 hasConcept C151730666 @default.
- W2012124880 hasConcept C15336307 @default.
- W2012124880 hasConcept C154945302 @default.
- W2012124880 hasConcept C159108749 @default.
- W2012124880 hasConcept C160671074 @default.
- W2012124880 hasConcept C171250308 @default.
- W2012124880 hasConcept C192209626 @default.
- W2012124880 hasConcept C192562407 @default.
- W2012124880 hasConcept C198394728 @default.
- W2012124880 hasConcept C204223013 @default.
- W2012124880 hasConcept C205372480 @default.
- W2012124880 hasConcept C24890656 @default.
- W2012124880 hasConcept C2779227376 @default.
- W2012124880 hasConcept C31972630 @default.
- W2012124880 hasConcept C41008148 @default.
- W2012124880 hasConcept C49040817 @default.
- W2012124880 hasConcept C53524968 @default.
- W2012124880 hasConcept C58097730 @default.
- W2012124880 hasConcept C6260449 @default.
- W2012124880 hasConcept C77928131 @default.
- W2012124880 hasConcept C86803240 @default.
- W2012124880 hasConcept C89002693 @default.
- W2012124880 hasConceptScore W2012124880C120665830 @default.
- W2012124880 hasConceptScore W2012124880C121332964 @default.
- W2012124880 hasConceptScore W2012124880C138268822 @default.
- W2012124880 hasConceptScore W2012124880C151730666 @default.
- W2012124880 hasConceptScore W2012124880C15336307 @default.
- W2012124880 hasConceptScore W2012124880C154945302 @default.
- W2012124880 hasConceptScore W2012124880C159108749 @default.
- W2012124880 hasConceptScore W2012124880C160671074 @default.
- W2012124880 hasConceptScore W2012124880C171250308 @default.
- W2012124880 hasConceptScore W2012124880C192209626 @default.
- W2012124880 hasConceptScore W2012124880C192562407 @default.
- W2012124880 hasConceptScore W2012124880C198394728 @default.
- W2012124880 hasConceptScore W2012124880C204223013 @default.
- W2012124880 hasConceptScore W2012124880C205372480 @default.
- W2012124880 hasConceptScore W2012124880C24890656 @default.
- W2012124880 hasConceptScore W2012124880C2779227376 @default.
- W2012124880 hasConceptScore W2012124880C31972630 @default.
- W2012124880 hasConceptScore W2012124880C41008148 @default.
- W2012124880 hasConceptScore W2012124880C49040817 @default.
- W2012124880 hasConceptScore W2012124880C53524968 @default.
- W2012124880 hasConceptScore W2012124880C58097730 @default.
- W2012124880 hasConceptScore W2012124880C6260449 @default.
- W2012124880 hasConceptScore W2012124880C77928131 @default.
- W2012124880 hasConceptScore W2012124880C86803240 @default.
- W2012124880 hasConceptScore W2012124880C89002693 @default.
- W2012124880 hasLocation W20121248801 @default.
- W2012124880 hasOpenAccess W2012124880 @default.
- W2012124880 hasPrimaryLocation W20121248801 @default.
- W2012124880 hasRelatedWork W2004027286 @default.
- W2012124880 hasRelatedWork W2015926731 @default.
- W2012124880 hasRelatedWork W2069371907 @default.
- W2012124880 hasRelatedWork W2076690315 @default.
- W2012124880 hasRelatedWork W2085460812 @default.
- W2012124880 hasRelatedWork W2089615691 @default.
- W2012124880 hasRelatedWork W2114348217 @default.
- W2012124880 hasRelatedWork W2119359690 @default.
- W2012124880 hasRelatedWork W2214749101 @default.
- W2012124880 hasRelatedWork W3014624889 @default.
- W2012124880 isParatext "false" @default.
- W2012124880 isRetracted "false" @default.
- W2012124880 magId "2012124880" @default.
- W2012124880 workType "article" @default.