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- W2012130478 abstract "A technique for fabricating GaAs/AlGaAs first-order gratings using electron beam (EB) lithography and its application to long-cavity distributed-Bragg-reflector (DBR) laser diodes are presented. The field stitching error, which limits the application of EB lithography to optical devices, was reduced to 5 nm by deflection amplitude calibration using marks on the samples. A technique for controlling the coupling coefficient using partially corrugated gratings is also proposed. These techniques were applied to fabrication of GaAs/AlGaAs first-order gratings of graded-index, separate-confinement-heterostructure, single-quantum-well (GRIN-SCH-SQW) distributed-Bragg-reflector (DBR) laser diodes. The resulting stitching error did not influence the single-mode lasing characteristics, and a very narrow linewidth of 237 kHz was achieved. The results show that EB lithography using the above techniques is useful in the fabrication of various optical devices with gratings.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2012130478 date "1993-06-01" @default.
- W2012130478 modified "2023-09-26" @default.
- W2012130478 title "GaAs/AlGaAs first-order gratings fabricated with electron beam lithography and very-narrow-linewidth long-cavity DBR laser diodes" @default.
- W2012130478 doi "https://doi.org/10.1109/3.234472" @default.
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