Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012133317> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2012133317 endingPage "346" @default.
- W2012133317 startingPage "343" @default.
- W2012133317 abstract "Nitrocellulose functions as a self-developing resist when exposed to heavy ions (Ar+). However, when the resist is exposed to light ions (H+) the resist decomposes losing its nitrates and forming a nonvolatile residue. This residue consists primarily of carbon as determined by x-ray photoelectron spectroscopy (XPS). Nitrocellulose exposed to light ions, therefore, does not self-develop but forms a carbon-rich skin on the resist surface. These areas are protected by this skin during subsequent flood exposure with heavy ions, resulting in a negative resist image of the light ion exposure. The self-developing properties of nitrocellulose also make possible unique processing steps. One example is a dry lift-off. This has been accomplished by patterning the resist and evaporating metal onto the substrate and resist surfaces. The metal on the resist is lifted off with a jet of hot, dry nitrogen which volatilizes the resist and blows away the metal leaving only the metal previously deposited on the substrate." @default.
- W2012133317 created "2016-06-24" @default.
- W2012133317 creator A5003098611 @default.
- W2012133317 creator A5016109938 @default.
- W2012133317 creator A5030070049 @default.
- W2012133317 creator A5057008439 @default.
- W2012133317 creator A5083794114 @default.
- W2012133317 creator A5087447764 @default.
- W2012133317 creator A5087496085 @default.
- W2012133317 date "1985-01-01" @default.
- W2012133317 modified "2023-10-16" @default.
- W2012133317 title "Nitrocellulose as a positive or negative self-developing resist" @default.
- W2012133317 doi "https://doi.org/10.1116/1.583260" @default.
- W2012133317 hasPublicationYear "1985" @default.
- W2012133317 type Work @default.
- W2012133317 sameAs 2012133317 @default.
- W2012133317 citedByCount "22" @default.
- W2012133317 countsByYear W20121333172013 @default.
- W2012133317 countsByYear W20121333172014 @default.
- W2012133317 countsByYear W20121333172022 @default.
- W2012133317 crossrefType "journal-article" @default.
- W2012133317 hasAuthorship W2012133317A5003098611 @default.
- W2012133317 hasAuthorship W2012133317A5016109938 @default.
- W2012133317 hasAuthorship W2012133317A5030070049 @default.
- W2012133317 hasAuthorship W2012133317A5057008439 @default.
- W2012133317 hasAuthorship W2012133317A5083794114 @default.
- W2012133317 hasAuthorship W2012133317A5087447764 @default.
- W2012133317 hasAuthorship W2012133317A5087496085 @default.
- W2012133317 hasConcept C107872376 @default.
- W2012133317 hasConcept C113196181 @default.
- W2012133317 hasConcept C127413603 @default.
- W2012133317 hasConcept C145148216 @default.
- W2012133317 hasConcept C171250308 @default.
- W2012133317 hasConcept C175708663 @default.
- W2012133317 hasConcept C178790620 @default.
- W2012133317 hasConcept C185592680 @default.
- W2012133317 hasConcept C191897082 @default.
- W2012133317 hasConcept C192562407 @default.
- W2012133317 hasConcept C199164860 @default.
- W2012133317 hasConcept C2778954975 @default.
- W2012133317 hasConcept C2779227376 @default.
- W2012133317 hasConcept C41625074 @default.
- W2012133317 hasConcept C42360764 @default.
- W2012133317 hasConcept C53524968 @default.
- W2012133317 hasConcept C544153396 @default.
- W2012133317 hasConcept C55493867 @default.
- W2012133317 hasConceptScore W2012133317C107872376 @default.
- W2012133317 hasConceptScore W2012133317C113196181 @default.
- W2012133317 hasConceptScore W2012133317C127413603 @default.
- W2012133317 hasConceptScore W2012133317C145148216 @default.
- W2012133317 hasConceptScore W2012133317C171250308 @default.
- W2012133317 hasConceptScore W2012133317C175708663 @default.
- W2012133317 hasConceptScore W2012133317C178790620 @default.
- W2012133317 hasConceptScore W2012133317C185592680 @default.
- W2012133317 hasConceptScore W2012133317C191897082 @default.
- W2012133317 hasConceptScore W2012133317C192562407 @default.
- W2012133317 hasConceptScore W2012133317C199164860 @default.
- W2012133317 hasConceptScore W2012133317C2778954975 @default.
- W2012133317 hasConceptScore W2012133317C2779227376 @default.
- W2012133317 hasConceptScore W2012133317C41625074 @default.
- W2012133317 hasConceptScore W2012133317C42360764 @default.
- W2012133317 hasConceptScore W2012133317C53524968 @default.
- W2012133317 hasConceptScore W2012133317C544153396 @default.
- W2012133317 hasConceptScore W2012133317C55493867 @default.
- W2012133317 hasIssue "1" @default.
- W2012133317 hasLocation W20121333171 @default.
- W2012133317 hasOpenAccess W2012133317 @default.
- W2012133317 hasPrimaryLocation W20121333171 @default.
- W2012133317 hasRelatedWork W2014841670 @default.
- W2012133317 hasRelatedWork W2017084338 @default.
- W2012133317 hasRelatedWork W2019513132 @default.
- W2012133317 hasRelatedWork W2025916505 @default.
- W2012133317 hasRelatedWork W2053831863 @default.
- W2012133317 hasRelatedWork W2082852349 @default.
- W2012133317 hasRelatedWork W2088899554 @default.
- W2012133317 hasRelatedWork W2240599136 @default.
- W2012133317 hasRelatedWork W2519698456 @default.
- W2012133317 hasRelatedWork W2899084033 @default.
- W2012133317 hasVolume "3" @default.
- W2012133317 isParatext "false" @default.
- W2012133317 isRetracted "false" @default.
- W2012133317 magId "2012133317" @default.
- W2012133317 workType "article" @default.