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- W2012164247 abstract "Adducts have become increasingly important as precursors in MOVPE, particularly for the growth of indium compounds. This review describes adducts and their properties and results that have been obtained for the growth of compounds of the Ga-In-As-P system. The problem of pre-reaction that has been encountered in the growth of In compounds using conventional alkyls and reasons for its variability of extent are discussed. The value of adducts for totally eliminating the problem is demonstrated. The use of adducts for the growth InP, GaInAs and GaInAsP, both by in situ formation from the alkyls and by preformed adducts is described. Their use as single sources of III–V compounds is also covered. The relative merits of preformed adducts over metal alkyls are considered and the results obtained from simple growth systems which have taken advantage of the more stable properties of adducts are reported." @default.
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- W2012164247 date "1984-09-01" @default.
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- W2012164247 title "Adducts in the growth of III–V compounds" @default.
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- W2012164247 doi "https://doi.org/10.1016/0022-0248(84)90401-9" @default.
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