Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012168139> ?p ?o ?g. }
- W2012168139 endingPage "1644" @default.
- W2012168139 startingPage "1634" @default.
- W2012168139 abstract "Polymer thin films are widely used as coatings and interlevel dielectrics in microelectronic applications. In thin-film structures, stresses are generated due to interaction with adjacent layers and film shrinkage due to solvent evaporation or curing. This causes polymer chain orientation resulting in anisotropic (direction dependent) film properties. The dual capacitor technique has been developed to measure in situ, the through-plane (z) stress-strain behavior of thin polymer films. A parallel plate capacitor device and an interdigitated electrode structure were used as sensors to detect changes in dielectric permittivity and thickness of thin polymer films under compression. The analytical and finite element models used to interpret the capacitance measurements have been presented. The Clausius–Mossotti equation was used to determine the volume change in the film from the permittivity measurements. Results have been reported for 10–14 μm thick, Cyclotene 4026-46 benzocyclobutene films and 10–12 μm thick films of polyimide PI-2611. The Cyclotene 4026-46 films were found to be mechanically isotropic, whereas the PI-2611 films were highly anisotropic. © 2000 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 38: 1634–1644, 2000" @default.
- W2012168139 created "2016-06-24" @default.
- W2012168139 creator A5005847933 @default.
- W2012168139 creator A5051789763 @default.
- W2012168139 creator A5073589308 @default.
- W2012168139 date "2000-06-15" @default.
- W2012168139 modified "2023-10-13" @default.
- W2012168139 title "Dual capacitor technique for measurement of through-plane modulus of thin polymer films" @default.
- W2012168139 cites W1965371295 @default.
- W2012168139 cites W1972100706 @default.
- W2012168139 cites W1980688355 @default.
- W2012168139 cites W1985193315 @default.
- W2012168139 cites W1988451626 @default.
- W2012168139 cites W1992424260 @default.
- W2012168139 cites W1993394997 @default.
- W2012168139 cites W1993993221 @default.
- W2012168139 cites W1994726597 @default.
- W2012168139 cites W2000113753 @default.
- W2012168139 cites W2000770256 @default.
- W2012168139 cites W2010577606 @default.
- W2012168139 cites W2011193889 @default.
- W2012168139 cites W2011902307 @default.
- W2012168139 cites W2019884460 @default.
- W2012168139 cites W2028015831 @default.
- W2012168139 cites W2032673701 @default.
- W2012168139 cites W2038414994 @default.
- W2012168139 cites W2045563107 @default.
- W2012168139 cites W2048201495 @default.
- W2012168139 cites W2049230460 @default.
- W2012168139 cites W2049768445 @default.
- W2012168139 cites W2070663004 @default.
- W2012168139 cites W2072146069 @default.
- W2012168139 cites W2072239398 @default.
- W2012168139 cites W2091364344 @default.
- W2012168139 cites W2099058816 @default.
- W2012168139 cites W2110787106 @default.
- W2012168139 cites W2130762650 @default.
- W2012168139 cites W2163710090 @default.
- W2012168139 cites W2165361344 @default.
- W2012168139 cites W2313548793 @default.
- W2012168139 cites W2330403871 @default.
- W2012168139 cites W4240718264 @default.
- W2012168139 doi "https://doi.org/10.1002/(sici)1099-0488(20000615)38:12<1634::aid-polb90>3.0.co;2-v" @default.
- W2012168139 hasPublicationYear "2000" @default.
- W2012168139 type Work @default.
- W2012168139 sameAs 2012168139 @default.
- W2012168139 citedByCount "17" @default.
- W2012168139 countsByYear W20121681392014 @default.
- W2012168139 countsByYear W20121681392016 @default.
- W2012168139 countsByYear W20121681392018 @default.
- W2012168139 countsByYear W20121681392022 @default.
- W2012168139 crossrefType "journal-article" @default.
- W2012168139 hasAuthorship W2012168139A5005847933 @default.
- W2012168139 hasAuthorship W2012168139A5051789763 @default.
- W2012168139 hasAuthorship W2012168139A5073589308 @default.
- W2012168139 hasConcept C119599485 @default.
- W2012168139 hasConcept C120665830 @default.
- W2012168139 hasConcept C121332964 @default.
- W2012168139 hasConcept C127413603 @default.
- W2012168139 hasConcept C133386390 @default.
- W2012168139 hasConcept C147789679 @default.
- W2012168139 hasConcept C159985019 @default.
- W2012168139 hasConcept C165801399 @default.
- W2012168139 hasConcept C168651791 @default.
- W2012168139 hasConcept C171250308 @default.
- W2012168139 hasConcept C17525397 @default.
- W2012168139 hasConcept C184050105 @default.
- W2012168139 hasConcept C185592680 @default.
- W2012168139 hasConcept C19067145 @default.
- W2012168139 hasConcept C192562407 @default.
- W2012168139 hasConcept C193867417 @default.
- W2012168139 hasConcept C2776366733 @default.
- W2012168139 hasConcept C2779227376 @default.
- W2012168139 hasConcept C2780965675 @default.
- W2012168139 hasConcept C30066665 @default.
- W2012168139 hasConcept C49040817 @default.
- W2012168139 hasConcept C52192207 @default.
- W2012168139 hasConcept C521977710 @default.
- W2012168139 hasConcept C85725439 @default.
- W2012168139 hasConceptScore W2012168139C119599485 @default.
- W2012168139 hasConceptScore W2012168139C120665830 @default.
- W2012168139 hasConceptScore W2012168139C121332964 @default.
- W2012168139 hasConceptScore W2012168139C127413603 @default.
- W2012168139 hasConceptScore W2012168139C133386390 @default.
- W2012168139 hasConceptScore W2012168139C147789679 @default.
- W2012168139 hasConceptScore W2012168139C159985019 @default.
- W2012168139 hasConceptScore W2012168139C165801399 @default.
- W2012168139 hasConceptScore W2012168139C168651791 @default.
- W2012168139 hasConceptScore W2012168139C171250308 @default.
- W2012168139 hasConceptScore W2012168139C17525397 @default.
- W2012168139 hasConceptScore W2012168139C184050105 @default.
- W2012168139 hasConceptScore W2012168139C185592680 @default.
- W2012168139 hasConceptScore W2012168139C19067145 @default.
- W2012168139 hasConceptScore W2012168139C192562407 @default.
- W2012168139 hasConceptScore W2012168139C193867417 @default.
- W2012168139 hasConceptScore W2012168139C2776366733 @default.
- W2012168139 hasConceptScore W2012168139C2779227376 @default.
- W2012168139 hasConceptScore W2012168139C2780965675 @default.