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- W2012169868 abstract "This paper will discuss further progress obtained at Dow for the improvement of the Resolution, Contact critical dimension uniformity(CDU), and Sensitivity of EUV chemically amplified resists. For resolution, we have employed the use of polymer-bound photoacid generator (PBP) concept to reduce the intrinsic acid diffusion that limits the ultimate resolving capability of CA resists. For CDU, we have focused on intrinsic dissolution contrast and have found that the photo-decomposable base (PDB) concept can be successfully employed. With the use of a PDB, we can reduce CDU variation at a lower exposure energy. For sensitivity, we have focused on more efficient EUV photon capture through increased EUV absorption, as well as more highly efficient PAGs for greater acid generating efficiency. The formulation concepts will be confirmed using Prolith stochastic resist modeling. For the 26nm hp contact holes, we get excellent overall process window with over 280nm depth of focus for a 10% exposure latitude Process window. The 1sigma Critical dimension uniformity [CDU] is 1.1 nm. We also obtain 20nm hp contact resolution in one of our new EUV resists." @default.
- W2012169868 created "2016-06-24" @default.
- W2012169868 creator A5016766358 @default.
- W2012169868 creator A5034555809 @default.
- W2012169868 creator A5044098423 @default.
- W2012169868 creator A5053083938 @default.
- W2012169868 creator A5058655649 @default.
- W2012169868 creator A5065076618 @default.
- W2012169868 creator A5073827017 @default.
- W2012169868 creator A5089305792 @default.
- W2012169868 creator A5091365170 @default.
- W2012169868 date "2013-03-29" @default.
- W2012169868 modified "2023-10-18" @default.
- W2012169868 title "Progress in resolution, sensitivity, and critical dimensional uniformity of EUV chemically amplified resists" @default.
- W2012169868 cites W2004773563 @default.
- W2012169868 cites W2027253590 @default.
- W2012169868 cites W2028856487 @default.
- W2012169868 cites W2032839057 @default.
- W2012169868 cites W2091420601 @default.
- W2012169868 cites W2106658793 @default.
- W2012169868 doi "https://doi.org/10.1117/12.2011565" @default.
- W2012169868 hasPublicationYear "2013" @default.
- W2012169868 type Work @default.
- W2012169868 sameAs 2012169868 @default.
- W2012169868 citedByCount "6" @default.
- W2012169868 countsByYear W20121698682013 @default.
- W2012169868 countsByYear W20121698682016 @default.
- W2012169868 countsByYear W20121698682017 @default.
- W2012169868 countsByYear W20121698682018 @default.
- W2012169868 countsByYear W20121698682023 @default.
- W2012169868 crossrefType "proceedings-article" @default.
- W2012169868 hasAuthorship W2012169868A5016766358 @default.
- W2012169868 hasAuthorship W2012169868A5034555809 @default.
- W2012169868 hasAuthorship W2012169868A5044098423 @default.
- W2012169868 hasAuthorship W2012169868A5053083938 @default.
- W2012169868 hasAuthorship W2012169868A5058655649 @default.
- W2012169868 hasAuthorship W2012169868A5065076618 @default.
- W2012169868 hasAuthorship W2012169868A5073827017 @default.
- W2012169868 hasAuthorship W2012169868A5089305792 @default.
- W2012169868 hasAuthorship W2012169868A5091365170 @default.
- W2012169868 hasConcept C120665830 @default.
- W2012169868 hasConcept C121332964 @default.
- W2012169868 hasConcept C127413603 @default.
- W2012169868 hasConcept C138268822 @default.
- W2012169868 hasConcept C146024833 @default.
- W2012169868 hasConcept C154945302 @default.
- W2012169868 hasConcept C162996421 @default.
- W2012169868 hasConcept C171250308 @default.
- W2012169868 hasConcept C192562407 @default.
- W2012169868 hasConcept C204223013 @default.
- W2012169868 hasConcept C207789793 @default.
- W2012169868 hasConcept C21200559 @default.
- W2012169868 hasConcept C24326235 @default.
- W2012169868 hasConcept C2777441419 @default.
- W2012169868 hasConcept C2779227376 @default.
- W2012169868 hasConcept C41008148 @default.
- W2012169868 hasConcept C49040817 @default.
- W2012169868 hasConcept C520434653 @default.
- W2012169868 hasConcept C53524968 @default.
- W2012169868 hasConceptScore W2012169868C120665830 @default.
- W2012169868 hasConceptScore W2012169868C121332964 @default.
- W2012169868 hasConceptScore W2012169868C127413603 @default.
- W2012169868 hasConceptScore W2012169868C138268822 @default.
- W2012169868 hasConceptScore W2012169868C146024833 @default.
- W2012169868 hasConceptScore W2012169868C154945302 @default.
- W2012169868 hasConceptScore W2012169868C162996421 @default.
- W2012169868 hasConceptScore W2012169868C171250308 @default.
- W2012169868 hasConceptScore W2012169868C192562407 @default.
- W2012169868 hasConceptScore W2012169868C204223013 @default.
- W2012169868 hasConceptScore W2012169868C207789793 @default.
- W2012169868 hasConceptScore W2012169868C21200559 @default.
- W2012169868 hasConceptScore W2012169868C24326235 @default.
- W2012169868 hasConceptScore W2012169868C2777441419 @default.
- W2012169868 hasConceptScore W2012169868C2779227376 @default.
- W2012169868 hasConceptScore W2012169868C41008148 @default.
- W2012169868 hasConceptScore W2012169868C49040817 @default.
- W2012169868 hasConceptScore W2012169868C520434653 @default.
- W2012169868 hasConceptScore W2012169868C53524968 @default.
- W2012169868 hasLocation W20121698681 @default.
- W2012169868 hasOpenAccess W2012169868 @default.
- W2012169868 hasPrimaryLocation W20121698681 @default.
- W2012169868 hasRelatedWork W1971760865 @default.
- W2012169868 hasRelatedWork W1991213903 @default.
- W2012169868 hasRelatedWork W1995361396 @default.
- W2012169868 hasRelatedWork W2074306519 @default.
- W2012169868 hasRelatedWork W2600199794 @default.
- W2012169868 hasRelatedWork W2894792331 @default.
- W2012169868 hasRelatedWork W2921363324 @default.
- W2012169868 hasRelatedWork W3013755930 @default.
- W2012169868 hasRelatedWork W3132309342 @default.
- W2012169868 hasRelatedWork W4283216871 @default.
- W2012169868 isParatext "false" @default.
- W2012169868 isRetracted "false" @default.
- W2012169868 magId "2012169868" @default.
- W2012169868 workType "article" @default.