Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012173478> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2012173478 endingPage "403" @default.
- W2012173478 startingPage "399" @default.
- W2012173478 abstract "To study the dynamics of dopant redistribution during the silicidation process, accurate secondary-ion-mass spectroscopy (SIMS) profiles of the dopant and matrix elements are needed in partially Ni silicided gates. A point-to-point calibration method was developed to quantify the SIMS profiles, taking into account the strong dependence of the ionization probabilities of As and B on the Ni content. The Ni and Si intensities, which are needed to monitor the variation in matrix composition, are influenced strongly by the used SIMS conditions. The Ni is pushed forward very effectively by an O2+ beam, when low impact angles are used. But also the use of Cs+ beam induces a serious broadening of the Ni profile. To identify the potential artifacts the sample is analyzed from the front and the back side. The use of backside SIMS turns out to be necessary to obtain accurate SIMS profiles of the Ni." @default.
- W2012173478 created "2016-06-24" @default.
- W2012173478 creator A5027760052 @default.
- W2012173478 creator A5042386910 @default.
- W2012173478 creator A5044486582 @default.
- W2012173478 creator A5049003157 @default.
- W2012173478 creator A5054772822 @default.
- W2012173478 creator A5072403772 @default.
- W2012173478 creator A5082183465 @default.
- W2012173478 date "2006-01-01" @default.
- W2012173478 modified "2023-10-01" @default.
- W2012173478 title "Dopant profiling in Ni[sub x]Si[sub 1−x] gates with secondary-ion-mass spectroscopy" @default.
- W2012173478 cites W1617196298 @default.
- W2012173478 cites W2006748949 @default.
- W2012173478 cites W2007524090 @default.
- W2012173478 cites W2125026000 @default.
- W2012173478 doi "https://doi.org/10.1116/1.2141622" @default.
- W2012173478 hasPublicationYear "2006" @default.
- W2012173478 type Work @default.
- W2012173478 sameAs 2012173478 @default.
- W2012173478 citedByCount "3" @default.
- W2012173478 crossrefType "journal-article" @default.
- W2012173478 hasAuthorship W2012173478A5027760052 @default.
- W2012173478 hasAuthorship W2012173478A5042386910 @default.
- W2012173478 hasAuthorship W2012173478A5044486582 @default.
- W2012173478 hasAuthorship W2012173478A5049003157 @default.
- W2012173478 hasAuthorship W2012173478A5054772822 @default.
- W2012173478 hasAuthorship W2012173478A5072403772 @default.
- W2012173478 hasAuthorship W2012173478A5082183465 @default.
- W2012173478 hasConcept C113196181 @default.
- W2012173478 hasConcept C121332964 @default.
- W2012173478 hasConcept C145148216 @default.
- W2012173478 hasConcept C162356407 @default.
- W2012173478 hasConcept C17744445 @default.
- W2012173478 hasConcept C178790620 @default.
- W2012173478 hasConcept C185592680 @default.
- W2012173478 hasConcept C187529661 @default.
- W2012173478 hasConcept C191952053 @default.
- W2012173478 hasConcept C192562407 @default.
- W2012173478 hasConcept C198291218 @default.
- W2012173478 hasConcept C199539241 @default.
- W2012173478 hasConcept C2909539053 @default.
- W2012173478 hasConcept C32891209 @default.
- W2012173478 hasConcept C43617362 @default.
- W2012173478 hasConcept C49040817 @default.
- W2012173478 hasConcept C544956773 @default.
- W2012173478 hasConcept C57863236 @default.
- W2012173478 hasConcept C62520636 @default.
- W2012173478 hasConcept C74080474 @default.
- W2012173478 hasConcept C77671233 @default.
- W2012173478 hasConcept C94625758 @default.
- W2012173478 hasConceptScore W2012173478C113196181 @default.
- W2012173478 hasConceptScore W2012173478C121332964 @default.
- W2012173478 hasConceptScore W2012173478C145148216 @default.
- W2012173478 hasConceptScore W2012173478C162356407 @default.
- W2012173478 hasConceptScore W2012173478C17744445 @default.
- W2012173478 hasConceptScore W2012173478C178790620 @default.
- W2012173478 hasConceptScore W2012173478C185592680 @default.
- W2012173478 hasConceptScore W2012173478C187529661 @default.
- W2012173478 hasConceptScore W2012173478C191952053 @default.
- W2012173478 hasConceptScore W2012173478C192562407 @default.
- W2012173478 hasConceptScore W2012173478C198291218 @default.
- W2012173478 hasConceptScore W2012173478C199539241 @default.
- W2012173478 hasConceptScore W2012173478C2909539053 @default.
- W2012173478 hasConceptScore W2012173478C32891209 @default.
- W2012173478 hasConceptScore W2012173478C43617362 @default.
- W2012173478 hasConceptScore W2012173478C49040817 @default.
- W2012173478 hasConceptScore W2012173478C544956773 @default.
- W2012173478 hasConceptScore W2012173478C57863236 @default.
- W2012173478 hasConceptScore W2012173478C62520636 @default.
- W2012173478 hasConceptScore W2012173478C74080474 @default.
- W2012173478 hasConceptScore W2012173478C77671233 @default.
- W2012173478 hasConceptScore W2012173478C94625758 @default.
- W2012173478 hasIssue "1" @default.
- W2012173478 hasLocation W20121734781 @default.
- W2012173478 hasOpenAccess W2012173478 @default.
- W2012173478 hasPrimaryLocation W20121734781 @default.
- W2012173478 hasRelatedWork W1015775940 @default.
- W2012173478 hasRelatedWork W1966763793 @default.
- W2012173478 hasRelatedWork W1985292131 @default.
- W2012173478 hasRelatedWork W1993414379 @default.
- W2012173478 hasRelatedWork W1998939217 @default.
- W2012173478 hasRelatedWork W1999654176 @default.
- W2012173478 hasRelatedWork W2009094487 @default.
- W2012173478 hasRelatedWork W2141974108 @default.
- W2012173478 hasRelatedWork W4220916081 @default.
- W2012173478 hasRelatedWork W2523580648 @default.
- W2012173478 hasVolume "24" @default.
- W2012173478 isParatext "false" @default.
- W2012173478 isRetracted "false" @default.
- W2012173478 magId "2012173478" @default.
- W2012173478 workType "article" @default.