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- W2012175095 abstract "A KrF excimer laser using an all solid state Pulse Power Modulator (PPM) has been studied. This PPM configuration replaces the commonly used thyratron switch with a Silicon Controlled Rectifier (SCR) switch combined with a pulse compression-voltage multiplication circuit. Use of this PPM has extended the useful chamber life of a line-narrowed KrF excimer laser from 1.5 billion to 2.5 billion pulses. Broadband KrF laser performance, optimized for mirror based scanner systems, has also been investigated. A minimum broadband chamber life of 5 billion pulses has been demonstrated with this solid state PPM. While a thyratron-based PPM exhibits an expected lifetime of 3 billion pulses, the solid state PPM used in these experiments has been operated for greater than 6 billion pulses without any decrease in performance. Since 72% of the replacement parts cost for the ELS-4000D line-narrowed excimer laser is due to periodic chamber and PPM replacement, significant cost of ownership reduction is realized by extending the lifetime of the chamber and the PPM." @default.
- W2012175095 created "2016-06-24" @default.
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- W2012175095 date "1995-05-26" @default.
- W2012175095 modified "2023-09-23" @default.
- W2012175095 title "<title>Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration</title>" @default.
- W2012175095 doi "https://doi.org/10.1117/12.209294" @default.
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