Matches in SemOpenAlex for { <https://semopenalex.org/work/W2012183797> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2012183797 endingPage "1983" @default.
- W2012183797 startingPage "1979" @default.
- W2012183797 abstract "Chemical vapor deposition films of titanium and tungsten silicides have been characterized using secondary ion mass spectrometry (SIMS) and sputtered neutral analysis (SNA). SIMS data for bulk impurities and interfacial contaminants was quantified by reference to ion implant standards generated in situ in the ion microanalyzer. SNA analyses for film stoichiometry were also performed in the same instrument, ionization of the sputtered neutral flux being achieved by gas phase impact of primary ions. The films were found to contain significant levels of H, O, F, and Cl impurities, which largely migrated on annealing either out of the film or to a subsurface interface." @default.
- W2012183797 created "2016-06-24" @default.
- W2012183797 creator A5031393112 @default.
- W2012183797 creator A5077500891 @default.
- W2012183797 date "1987-07-01" @default.
- W2012183797 modified "2023-09-26" @default.
- W2012183797 title "Quantitative analysis of chemical vapor deposition refractory metal silicides" @default.
- W2012183797 doi "https://doi.org/10.1116/1.574898" @default.
- W2012183797 hasPublicationYear "1987" @default.
- W2012183797 type Work @default.
- W2012183797 sameAs 2012183797 @default.
- W2012183797 citedByCount "4" @default.
- W2012183797 crossrefType "journal-article" @default.
- W2012183797 hasAuthorship W2012183797A5031393112 @default.
- W2012183797 hasAuthorship W2012183797A5077500891 @default.
- W2012183797 hasConcept C107872376 @default.
- W2012183797 hasConcept C113196181 @default.
- W2012183797 hasConcept C138411078 @default.
- W2012183797 hasConcept C144082473 @default.
- W2012183797 hasConcept C147789679 @default.
- W2012183797 hasConcept C162356407 @default.
- W2012183797 hasConcept C171250308 @default.
- W2012183797 hasConcept C178790620 @default.
- W2012183797 hasConcept C179104552 @default.
- W2012183797 hasConcept C185592680 @default.
- W2012183797 hasConcept C187529661 @default.
- W2012183797 hasConcept C19067145 @default.
- W2012183797 hasConcept C191897082 @default.
- W2012183797 hasConcept C192562407 @default.
- W2012183797 hasConcept C22423302 @default.
- W2012183797 hasConcept C2777855556 @default.
- W2012183797 hasConcept C43617362 @default.
- W2012183797 hasConcept C506065880 @default.
- W2012183797 hasConcept C542268612 @default.
- W2012183797 hasConcept C57410435 @default.
- W2012183797 hasConcept C71987851 @default.
- W2012183797 hasConcept C77671233 @default.
- W2012183797 hasConcept C95627916 @default.
- W2012183797 hasConceptScore W2012183797C107872376 @default.
- W2012183797 hasConceptScore W2012183797C113196181 @default.
- W2012183797 hasConceptScore W2012183797C138411078 @default.
- W2012183797 hasConceptScore W2012183797C144082473 @default.
- W2012183797 hasConceptScore W2012183797C147789679 @default.
- W2012183797 hasConceptScore W2012183797C162356407 @default.
- W2012183797 hasConceptScore W2012183797C171250308 @default.
- W2012183797 hasConceptScore W2012183797C178790620 @default.
- W2012183797 hasConceptScore W2012183797C179104552 @default.
- W2012183797 hasConceptScore W2012183797C185592680 @default.
- W2012183797 hasConceptScore W2012183797C187529661 @default.
- W2012183797 hasConceptScore W2012183797C19067145 @default.
- W2012183797 hasConceptScore W2012183797C191897082 @default.
- W2012183797 hasConceptScore W2012183797C192562407 @default.
- W2012183797 hasConceptScore W2012183797C22423302 @default.
- W2012183797 hasConceptScore W2012183797C2777855556 @default.
- W2012183797 hasConceptScore W2012183797C43617362 @default.
- W2012183797 hasConceptScore W2012183797C506065880 @default.
- W2012183797 hasConceptScore W2012183797C542268612 @default.
- W2012183797 hasConceptScore W2012183797C57410435 @default.
- W2012183797 hasConceptScore W2012183797C71987851 @default.
- W2012183797 hasConceptScore W2012183797C77671233 @default.
- W2012183797 hasConceptScore W2012183797C95627916 @default.
- W2012183797 hasIssue "4" @default.
- W2012183797 hasLocation W20121837971 @default.
- W2012183797 hasOpenAccess W2012183797 @default.
- W2012183797 hasPrimaryLocation W20121837971 @default.
- W2012183797 hasRelatedWork W1795805782 @default.
- W2012183797 hasRelatedWork W1966763793 @default.
- W2012183797 hasRelatedWork W1967790497 @default.
- W2012183797 hasRelatedWork W1999654176 @default.
- W2012183797 hasRelatedWork W2000350419 @default.
- W2012183797 hasRelatedWork W2035848439 @default.
- W2012183797 hasRelatedWork W2085472019 @default.
- W2012183797 hasRelatedWork W2145322423 @default.
- W2012183797 hasRelatedWork W2321729824 @default.
- W2012183797 hasRelatedWork W2806669066 @default.
- W2012183797 hasVolume "5" @default.
- W2012183797 isParatext "false" @default.
- W2012183797 isRetracted "false" @default.
- W2012183797 magId "2012183797" @default.
- W2012183797 workType "article" @default.