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- W2012201169 endingPage "021122" @default.
- W2012201169 startingPage "021122" @default.
- W2012201169 abstract "We present an ohmic series radio-frequency microelectromechanical system (RF MEMS) switch based on a moveable corrugated diaphragm that activates switch contact. Corrugation technology is introduced in the SiO2/Si3N4 diaphragm for reducing the residual stress in the diaphragm. Moreover, a multilayer metallization system containing ruthenium/gold is proposed as a contact metal to address the reliability of the switch contact. The concept of the corrugated diaphragm, together with a ruthenium/gold contact-metal system, is proven by the characterization of fabricated RF MEMS switches to be an effective way to realize reliable electric contact with significantly reduced pull-in voltage. The durability of the switch contact is increased significantly with the introduction of the multilayer metal, compared to a pure gold contact." @default.
- W2012201169 created "2016-06-24" @default.
- W2012201169 creator A5031100793 @default.
- W2012201169 creator A5068031255 @default.
- W2012201169 creator A5090424198 @default.
- W2012201169 date "2009-04-01" @default.
- W2012201169 modified "2023-09-23" @default.
- W2012201169 title "Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm" @default.
- W2012201169 cites W1974847231 @default.
- W2012201169 cites W1977733550 @default.
- W2012201169 cites W1984181828 @default.
- W2012201169 cites W2005189854 @default.
- W2012201169 cites W2078884572 @default.
- W2012201169 cites W2089368821 @default.
- W2012201169 cites W2091621483 @default.
- W2012201169 cites W2105361305 @default.
- W2012201169 cites W2106111513 @default.
- W2012201169 cites W2112966942 @default.
- W2012201169 cites W2114218810 @default.
- W2012201169 cites W2129590901 @default.
- W2012201169 cites W2166252808 @default.
- W2012201169 cites W2166529718 @default.
- W2012201169 cites W2168237894 @default.
- W2012201169 cites W2171833008 @default.
- W2012201169 cites W2173696150 @default.
- W2012201169 cites W2946723398 @default.
- W2012201169 cites W4376848482 @default.
- W2012201169 doi "https://doi.org/10.1117/1.3100204" @default.
- W2012201169 hasPublicationYear "2009" @default.
- W2012201169 type Work @default.
- W2012201169 sameAs 2012201169 @default.
- W2012201169 citedByCount "2" @default.
- W2012201169 countsByYear W20122011692016 @default.
- W2012201169 countsByYear W20122011692019 @default.
- W2012201169 crossrefType "journal-article" @default.
- W2012201169 hasAuthorship W2012201169A5031100793 @default.
- W2012201169 hasAuthorship W2012201169A5068031255 @default.
- W2012201169 hasAuthorship W2012201169A5090424198 @default.
- W2012201169 hasConcept C119599485 @default.
- W2012201169 hasConcept C121332964 @default.
- W2012201169 hasConcept C127413603 @default.
- W2012201169 hasConcept C132235601 @default.
- W2012201169 hasConcept C138230450 @default.
- W2012201169 hasConcept C157138929 @default.
- W2012201169 hasConcept C163258240 @default.
- W2012201169 hasConcept C164292776 @default.
- W2012201169 hasConcept C165801399 @default.
- W2012201169 hasConcept C171250308 @default.
- W2012201169 hasConcept C192562407 @default.
- W2012201169 hasConcept C2779227376 @default.
- W2012201169 hasConcept C37977207 @default.
- W2012201169 hasConcept C43214815 @default.
- W2012201169 hasConcept C49040817 @default.
- W2012201169 hasConcept C62520636 @default.
- W2012201169 hasConcept C74064498 @default.
- W2012201169 hasConceptScore W2012201169C119599485 @default.
- W2012201169 hasConceptScore W2012201169C121332964 @default.
- W2012201169 hasConceptScore W2012201169C127413603 @default.
- W2012201169 hasConceptScore W2012201169C132235601 @default.
- W2012201169 hasConceptScore W2012201169C138230450 @default.
- W2012201169 hasConceptScore W2012201169C157138929 @default.
- W2012201169 hasConceptScore W2012201169C163258240 @default.
- W2012201169 hasConceptScore W2012201169C164292776 @default.
- W2012201169 hasConceptScore W2012201169C165801399 @default.
- W2012201169 hasConceptScore W2012201169C171250308 @default.
- W2012201169 hasConceptScore W2012201169C192562407 @default.
- W2012201169 hasConceptScore W2012201169C2779227376 @default.
- W2012201169 hasConceptScore W2012201169C37977207 @default.
- W2012201169 hasConceptScore W2012201169C43214815 @default.
- W2012201169 hasConceptScore W2012201169C49040817 @default.
- W2012201169 hasConceptScore W2012201169C62520636 @default.
- W2012201169 hasConceptScore W2012201169C74064498 @default.
- W2012201169 hasIssue "2" @default.
- W2012201169 hasLocation W20122011691 @default.
- W2012201169 hasOpenAccess W2012201169 @default.
- W2012201169 hasPrimaryLocation W20122011691 @default.
- W2012201169 hasRelatedWork W1545754614 @default.
- W2012201169 hasRelatedWork W1985336541 @default.
- W2012201169 hasRelatedWork W1988926560 @default.
- W2012201169 hasRelatedWork W2012201169 @default.
- W2012201169 hasRelatedWork W2065125548 @default.
- W2012201169 hasRelatedWork W2152921684 @default.
- W2012201169 hasRelatedWork W2323884261 @default.
- W2012201169 hasRelatedWork W2503704036 @default.
- W2012201169 hasRelatedWork W2753078810 @default.
- W2012201169 hasRelatedWork W3142650675 @default.
- W2012201169 hasVolume "8" @default.
- W2012201169 isParatext "false" @default.
- W2012201169 isRetracted "false" @default.
- W2012201169 magId "2012201169" @default.
- W2012201169 workType "article" @default.