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- W2012203988 endingPage "652" @default.
- W2012203988 startingPage "649" @default.
- W2012203988 abstract "Contact property of aluminum and 4H-SiC wafer with crystallized amorphous-silicon (a-Si) interlayer was investigated. A phosphorus-doped a-Si layer on SiC wafer was crystallized by annealing at 1377 °C. Good ohmic contact behavior and contact resistivity of 2.1 × 10 -6 Ωcm 2 were obtained without silicidation annealing process. Furthermore, non-doped crystallized a-Si layer insertion layer also showed ohmic contact property. However, high contact resistivity of 8.2×10 -4 Ωcm 2 was obtained in the non-doped a-Si sample. X-ray photo-electron spectroscopy analysis suggests that conduction band offset is significantly reduced between crystallized a-Si and SiC wafer. Therefore, a-Si insertion layer is effective for Schottky barrier height decreasing and high doping into Si layer forms low contact resistivity between Al and SiC, indirectly." @default.
- W2012203988 created "2016-06-24" @default.
- W2012203988 creator A5007123377 @default.
- W2012203988 creator A5032530951 @default.
- W2012203988 creator A5047177055 @default.
- W2012203988 creator A5049181536 @default.
- W2012203988 creator A5049874651 @default.
- W2012203988 creator A5076187024 @default.
- W2012203988 creator A5083109680 @default.
- W2012203988 creator A5083329732 @default.
- W2012203988 date "2014-02-01" @default.
- W2012203988 modified "2023-09-27" @default.
- W2012203988 title "Properties of Al Ohmic Contacts to n-type 4H-SiC Employing a Phosphorus-Doped and Crystallized Amorphous-Silicon Interlayer" @default.
- W2012203988 cites W1980637942 @default.
- W2012203988 cites W2013957125 @default.
- W2012203988 cites W2034014057 @default.
- W2012203988 cites W2071742159 @default.
- W2012203988 cites W2079518888 @default.
- W2012203988 doi "https://doi.org/10.4028/www.scientific.net/msf.778-780.649" @default.
- W2012203988 hasPublicationYear "2014" @default.
- W2012203988 type Work @default.
- W2012203988 sameAs 2012203988 @default.
- W2012203988 citedByCount "5" @default.
- W2012203988 countsByYear W20122039882014 @default.
- W2012203988 countsByYear W20122039882015 @default.
- W2012203988 countsByYear W20122039882016 @default.
- W2012203988 countsByYear W20122039882020 @default.
- W2012203988 countsByYear W20122039882022 @default.
- W2012203988 crossrefType "journal-article" @default.
- W2012203988 hasAuthorship W2012203988A5007123377 @default.
- W2012203988 hasAuthorship W2012203988A5032530951 @default.
- W2012203988 hasAuthorship W2012203988A5047177055 @default.
- W2012203988 hasAuthorship W2012203988A5049181536 @default.
- W2012203988 hasAuthorship W2012203988A5049874651 @default.
- W2012203988 hasAuthorship W2012203988A5076187024 @default.
- W2012203988 hasAuthorship W2012203988A5083109680 @default.
- W2012203988 hasAuthorship W2012203988A5083329732 @default.
- W2012203988 hasConcept C119599485 @default.
- W2012203988 hasConcept C123671423 @default.
- W2012203988 hasConcept C127413603 @default.
- W2012203988 hasConcept C138230450 @default.
- W2012203988 hasConcept C159985019 @default.
- W2012203988 hasConcept C160671074 @default.
- W2012203988 hasConcept C16115445 @default.
- W2012203988 hasConcept C185592680 @default.
- W2012203988 hasConcept C192562407 @default.
- W2012203988 hasConcept C2776390347 @default.
- W2012203988 hasConcept C2777855556 @default.
- W2012203988 hasConcept C2779227376 @default.
- W2012203988 hasConcept C2779667780 @default.
- W2012203988 hasConcept C49040817 @default.
- W2012203988 hasConcept C544956773 @default.
- W2012203988 hasConcept C56052488 @default.
- W2012203988 hasConcept C57863236 @default.
- W2012203988 hasConcept C69990965 @default.
- W2012203988 hasConcept C78434282 @default.
- W2012203988 hasConcept C8010536 @default.
- W2012203988 hasConceptScore W2012203988C119599485 @default.
- W2012203988 hasConceptScore W2012203988C123671423 @default.
- W2012203988 hasConceptScore W2012203988C127413603 @default.
- W2012203988 hasConceptScore W2012203988C138230450 @default.
- W2012203988 hasConceptScore W2012203988C159985019 @default.
- W2012203988 hasConceptScore W2012203988C160671074 @default.
- W2012203988 hasConceptScore W2012203988C16115445 @default.
- W2012203988 hasConceptScore W2012203988C185592680 @default.
- W2012203988 hasConceptScore W2012203988C192562407 @default.
- W2012203988 hasConceptScore W2012203988C2776390347 @default.
- W2012203988 hasConceptScore W2012203988C2777855556 @default.
- W2012203988 hasConceptScore W2012203988C2779227376 @default.
- W2012203988 hasConceptScore W2012203988C2779667780 @default.
- W2012203988 hasConceptScore W2012203988C49040817 @default.
- W2012203988 hasConceptScore W2012203988C544956773 @default.
- W2012203988 hasConceptScore W2012203988C56052488 @default.
- W2012203988 hasConceptScore W2012203988C57863236 @default.
- W2012203988 hasConceptScore W2012203988C69990965 @default.
- W2012203988 hasConceptScore W2012203988C78434282 @default.
- W2012203988 hasConceptScore W2012203988C8010536 @default.
- W2012203988 hasLocation W20122039881 @default.
- W2012203988 hasOpenAccess W2012203988 @default.
- W2012203988 hasPrimaryLocation W20122039881 @default.
- W2012203988 hasRelatedWork W1991671539 @default.
- W2012203988 hasRelatedWork W1991870923 @default.
- W2012203988 hasRelatedWork W2010729172 @default.
- W2012203988 hasRelatedWork W2026845666 @default.
- W2012203988 hasRelatedWork W2083905050 @default.
- W2012203988 hasRelatedWork W2126473095 @default.
- W2012203988 hasRelatedWork W2370848313 @default.
- W2012203988 hasRelatedWork W2384550850 @default.
- W2012203988 hasRelatedWork W2901771397 @default.
- W2012203988 hasRelatedWork W4309149952 @default.
- W2012203988 hasVolume "778-780" @default.
- W2012203988 isParatext "false" @default.
- W2012203988 isRetracted "false" @default.
- W2012203988 magId "2012203988" @default.
- W2012203988 workType "article" @default.