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- W2012226900 abstract "The model of silicon nitride film deposition in a batch furnace from dichlorosilane ( SiH 2 Cl 2 ; DCS) and ammonia ( NH 3 ) is presented. The gas-phase and surface reaction rates of DCS are estimated from thickness profiles along the gas stream direction, and surface reaction and DCS decomposition are found to be of Langmuir and Lindemann types, respectively. It means that at a normal deposition temperature ( ∼1000 K), some DCS molecules adsorb directly on the Si surface while others decompose into a more reactive intermediate, SiCl 2 . At higher temperatures, the reverse reaction of DCS decomposition and the subsequent reaction of SiCl 2 with NH 3 may play significant roles. Using the present reaction rates, we estimate the film thickness profiles across a 12-inch wafer." @default.
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- W2012226900 date "1996-03-01" @default.
- W2012226900 modified "2023-09-23" @default.
- W2012226900 title "Kinetic Study of Silicon Nitride Growth from Dichlorosilane and Ammonia" @default.
- W2012226900 doi "https://doi.org/10.1143/jjap.35.1690" @default.
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